Publication

Carbon nanotube vertical membranes for electrostatically actuated micro-electro-mechanical devices

Mihai Adrian Ionescu
2010
Journal Articles

Abstract

In this work, we investigate vertically aligned carbon nanotube (CNT) membranes as building blocks to realize electrostatically actuated micro-electro-mechanical-systems (M EMS). The fabricated CNT dense arrays are grown on adjacent metal electrodes and can be actuated by applying a DC bias. The conductive membranes deflect when actuated and a clear pull-in is observed, as in any conventional MEM device using metal parallel plates. The Young's modulus of these membranes extracted from the pull-in voltage is in the range of 10s of MPa. S-parameter measurements for different actuation voltage shows a reduction in the insertion loss between the two electrodes with the increase in DC bias, indicating a change of the device capacitance. (C) 2009 Elsevier B.V. All rights reserved.

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https://infoscience.epfl.ch/entities/publication/7358f7e5-377a-4972-9feb-c44f82cb0998

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Mihai Adrian Ionescu
2010
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/7358f7e5-377a-4972-9feb-c44f82cb0998

About this result

Related concepts (32)

Carbon nanotube

A carbon nanotube (CNT) is a tube made of carbon with a diameter in the nanometer range (nanoscale). They are one of the allotropes of carbon. Single-walled carbon nanotubes (SWCNTs) have diameters around 0.5–2.0 nanometers, about 100,000 times smaller than the width of a human hair. They can be idealized as cutouts from a two-dimensional graphene sheet rolled up to form a hollow cylinder. Multi-walled carbon nanotubes (MWCNTs) consist of nested single-wall carbon nanotubes in a nested, tube-in-tube structure.

Potential applications of carbon nanotubes

Carbon nanotubes (CNTs) are cylinders of one or more layers of graphene (lattice). Diameters of single-walled carbon nanotubes (SWNTs) and multi-walled carbon nanotubes (MWNTs) are typically 0.8 to 2 nm and 5 to 20 nm, respectively, although MWNT diameters can exceed 100 nm. CNT lengths range from less than 100 nm to 0.5 m. Individual CNT walls can be metallic or semiconducting depending on the orientation of the lattice with respect to the tube axis, which is called chirality.

MEMS

MEMS (Microelectromechanical systems) is the technology of microscopic devices incorporating both electronic and moving parts. MEMS are made up of components between 1 and 100 micrometres in size (i.e., 0.001 to 0.1 mm), and MEMS devices generally range in size from 20 micrometres to a millimetre (i.e., 0.02 to 1.0 mm), although components arranged in arrays (e.g., digital micromirror devices) can be more than 1000 mm2.

Related publications (6)

Carbon nanotube vertical membranes for electrostatically actuated micro-electro-mechanical devices

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