Publication

Digital Holographic Microscopy (DHM) for metrology and dynamic characterization of MEMS and MOEMS

Christian Depeursinge, Tristan Colomb, Etienne Cuche, Florian Charrière, Frédéric Montfort
2006
Conference Papers

Abstract

Digital Holographic Microscopes (DHM) enables recording the whole information necessary to provide real time nanometric vertical displacement measurements with a single image acquisition. The use of fast acquisition camera or stroboscopic acquisition mode makes these new systems ideal tools for investigating the topography and dynamical behavior of MEMS and MOEMS. This is illustrated by the investigation of resonant frequencies of a dual axis micromirror. This enables the definition of the linear, non-linear, and modal resonance zones of its dynamical response.

Official source

https://infoscience.epfl.ch/entities/publication/60338ab0-0963-4f9f-bc4c-061f0c3f57d6

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Christian Depeursinge, Tristan Colomb, Etienne Cuche, Florian Charrière, Frédéric Montfort
2006
Conference Papers

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/60338ab0-0963-4f9f-bc4c-061f0c3f57d6

About this result

Related concepts (26)

Optical microscope

The optical microscope, also referred to as a light microscope, is a type of microscope that commonly uses visible light and a system of lenses to generate magnified images of small objects. Optical microscopes are the oldest design of microscope and were possibly invented in their present compound form in the 17th century. Basic optical microscopes can be very simple, although many complex designs aim to improve resolution and sample contrast. The object is placed on a stage and may be directly viewed through one or two eyepieces on the microscope.

Microscopy

Microscopy is the technical field of using microscopes to view objects and areas of objects that cannot be seen with the naked eye (objects that are not within the resolution range of the normal eye). There are three well-known branches of microscopy: optical, electron, and scanning probe microscopy, along with the emerging field of X-ray microscopy. Optical microscopy and electron microscopy involve the diffraction, reflection, or refraction of electromagnetic radiation/electron beams interacting with the specimen, and the collection of the scattered radiation or another signal in order to create an image.

Holography

Holography is a technique that enables a wavefront to be recorded and later re-constructed. Holography is best known as a method of generating real , but it also has a wide range of other applications. In principle, it is possible to make a hologram for any type of wave. A hologram is made by superimposing a second wavefront (normally called the reference beam) on the wavefront of interest, thereby generating an interference pattern which is recorded on a physical medium.

Related publications (1)

Digital Holographic Microscopy (DHM) for metrology and dynamic characterization of MEMS and MOEMS

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Aperture apodization using cubic spline interpolation: application in digital holographic microscopy