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A planar actuator device, including a base plate including a first, second, and third pair of planar coils, each pair of planar coils having an inner coil and an outer coil, each pair of planar coils arranged along a first, second, and third linear motion axis, respectively, the first, second, and third linear motion axis arranged in a star configuration, and an actuation mechanism including a first, second, and third planar legs and a centerpiece, the first, second and third planar legs pivotably connected to the centerpiece, the planar legs including a first, second, and third sliding element and a first, second, and third middle section, respectively, a sliding element and middle section of a respective leg pivotably connected to each other, each sliding element including a permanent magnet.
Yves Perriard, Yoan René Cyrille Civet, Paolo Germano, Christian Köchli, Sofia Lydia Ntella, Bhawnath Tiwari, Kenny Jeanmonod
Herbert Shea, Jean-Baptiste Chossat