Publication

Full tungsten and platinum nanoprobes for electrically conducting scanning probe methods

2006
Conference Papers

Abstract

We have developed hybrid AFM probes with SU-8 polymer body and full platinum and tungsten cantilever and tip. The fabrication process uses surface micromachining of a (100) silicon wafer. The metal (platinum or tungsten) is sputter deposited in oxidation sharpened moulds, giving a final tip sharpness smaller than 20 nm. A SU-8 body is subsequently formed. The release is either done by a wet back-side or dry top-side process. The measured hardness of the tungsten and platinum film values 14.8 GPa and 7.3 GPa, respectively. Contact resistances on a gold sample show 25 Ohm and 10 Ohm for the tungsten and platinum probes, respectively. The results are promising for the development of a robust electrically conducting probe.

Official source

https://infoscience.epfl.ch/entities/publication/5a306ce5-1574-40c1-9533-0b6bf6c29b16

About this result

This page is automatically generated and may contain information that is not correct, complete, up-to-date, or relevant to your search query. The same applies to every other page on this website. Please make sure to verify the information with EPFL's official sources.

Graph Chat

Chat with Graph Search

Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.

DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.

2006
Conference Papers

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/5a306ce5-1574-40c1-9533-0b6bf6c29b16

About this result

Related concepts (32)

Scanning probe microscopy

Scanning probe microscopy (SPM) is a branch of microscopy that forms images of surfaces using a physical probe that scans the specimen. SPM was founded in 1981, with the invention of the scanning tunneling microscope, an instrument for imaging surfaces at the atomic level. The first successful scanning tunneling microscope experiment was done by Gerd Binnig and Heinrich Rohrer. The key to their success was using a feedback loop to regulate gap distance between the sample and the probe.

Kelvin probe force microscope

Kelvin probe force microscopy (KPFM), also known as surface potential microscopy, is a noncontact variant of atomic force microscopy (AFM). By raster scanning in the x,y plane the work function of the sample can be locally mapped for correlation with sample features. When there is little or no magnification, this approach can be described as using a scanning Kelvin probe (SKP). These techniques are predominantly used to measure corrosion and coatings. With KPFM, the work function of surfaces can be observed at atomic or molecular scales.

Sputtering

In physics, sputtering is a phenomenon in which microscopic particles of a solid material are ejected from its surface, after the material is itself bombarded by energetic particles of a plasma or gas. It occurs naturally in outer space, and can be an unwelcome source of wear in precision components. However, the fact that it can be made to act on extremely fine layers of material is utilised in science and industry—there, it is used to perform precise etching, carry out analytical techniques, and deposit thin film layers in the manufacture of optical coatings, semiconductor devices and nanotechnology products.

Related publications (29)

Full tungsten and platinum nanoprobes for electrically conducting scanning probe methods

Chat with Graph Search

A Comprehensive Analysis of Combined AFM/SEM Systems for In-Situ Nanoscale Characterizations and Multiparametric Correlative Microscopy

Separate-scan atomic force microscope for fast infrared scattering-type scanning near-field optical microscope

Advanced SQUID-on-lever scanning probe for high-sensitivity magnetic microscopy with sub-100-nm spatial resolution