Tungsten Through Silicon Vias for 3D high quality factor embedded RF MEMS inductors

Mihai Adrian Ionescu, Montserrat Fernandez-Bolanos Badia, Wolfgang Amadeus Vitale
2013
Conference Papers

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Mihai Adrian Ionescu, Montserrat Fernandez-Bolanos Badia, Wolfgang Amadeus Vitale
2013
Conference Papers

Official source

Related publications (2)

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