Publication

Interconnection lines of platinum induced by laser direct writing

Hubert van den Bergh
1989
Journal Articles

Abstract

A laser-induced depostion technique is used to produce platinum interconnection lines for microelectronic applications. The influence of the laser power as well as the vapor pressure of the precursor upon the geometry, the morphol. and the line resistivity is studied. All the lines are essentially 100% Pt and resistivities very close to that of pure platinum can be achieved depending on the morphol. Line width equal to or less than the laser spot diam. have been obtained, thus enabling to produce lines in the submicron range.

Official source

https://infoscience.epfl.ch/entities/publication/54abafc0-05cc-4dc8-8539-d8fafa46f7ec

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Hubert van den Bergh
1989
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/54abafc0-05cc-4dc8-8539-d8fafa46f7ec

About this result

Related concepts (29)

Laser pointer

A laser pointer or laser pen is a small handheld device with a power source (usually a battery) and a laser diode emitting a very narrow coherent low-powered laser beam of visible light, intended to be used to highlight something of interest by illuminating it with a small bright spot of colored light. The small width of the beam and low power of typical laser pointers make the beam itself invisible in a clean atmosphere, only showing a point of light when striking an opaque surface.

Laser diode

A laser diode (LD, also injection laser diode or ILD, or diode laser) is a semiconductor device similar to a light-emitting diode in which a diode pumped directly with electrical current can create lasing conditions at the diode's junction. Driven by voltage, the doped p–n-transition allows for recombination of an electron with a hole. Due to the drop of the electron from a higher energy level to a lower one, radiation, in the form of an emitted photon is generated. This is spontaneous emission.

Laser

A laser is a device that emits light through a process of optical amplification based on the stimulated emission of electromagnetic radiation. The word laser is an anacronym that originated as an acronym for light amplification by stimulated emission of radiation. The first laser was built in 1960 by Theodore Maiman at Hughes Research Laboratories, based on theoretical work by Charles H. Townes and Arthur Leonard Schawlow. A laser differs from other sources of light in that it emits light that is coherent.

Related publications (8)

Interconnection lines of platinum induced by laser direct writing

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