Publication

Selective low-pressure chemical vapor deposition of copper and platinum

Hubert van den Bergh
1992
Journal Articles

Abstract

The low-pressure chem. vapor deposition of copper and platinum was studied on SiO2 substrates which had been locally prenucleated with ultrathin metal layers of Pt, Cu, Pd, Au, and W. These layers were between 0.1 and 30 .ANG. thick and were produced by vacuum evapn. Copper metal is deposited selectively on top of the prenucleation layers from gaseous bishexafluoroacetylacetonate {Cu(hfa)2} dild. in hydrogen. High-quality copper could be grown at temps. in the range of 300-400 Deg with elec. resistivities as low as 2.5 times the bulk copper value. In contrast, platinum deposited from gaseous Pt(hfa)2 in H2 grows selectively on clean oxide surface rather than on the areas prenucleated with vacuum evapd. platinum.

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https://infoscience.epfl.ch/entities/publication/4c826f30-5728-49e2-8ed9-5dd218086e39

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Hubert van den Bergh
1992
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/4c826f30-5728-49e2-8ed9-5dd218086e39

About this result

Related concepts (22)

Copper

Copper is a chemical element with the symbol Cu (from cuprum) and atomic number 29. It is a soft, malleable, and ductile metal with very high thermal and electrical conductivity. A freshly exposed surface of pure copper has a pinkish-orange color. Copper is used as a conductor of heat and electricity, as a building material, and as a constituent of various metal alloys, such as sterling silver used in jewelry, cupronickel used to make marine hardware and coins, and constantan used in strain gauges and thermocouples for temperature measurement.

Copper extraction

Copper extraction refers to the methods used to obtain copper from its ores. The conversion of copper ores consists of a series of physical, chemical and electrochemical processes. Methods have evolved and vary with country depending on the ore source, local environmental regulations, and other factors. The Old Copper Complex in North America has been radiometrically dated to 9500 BP—i.e., about 7480 BCE—making it one of the oldest known examples of copper extraction in the world.

Copper conductor

Copper has been used in electrical wiring since the invention of the electromagnet and the telegraph in the 1820s. The invention of the telephone in 1876 created further demand for copper wire as an electrical conductor. Copper is the electrical conductor in many categories of electrical wiring. Copper wire is used in power generation, power transmission, power distribution, telecommunications, electronics circuitry, and countless types of electrical equipment. Copper and its alloys are also used to make electrical contacts.

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Selective low-pressure chemical vapor deposition of copper and platinum

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