Publication

Multichannel Smart Slit Assembly For Spectroscopy Based On Arrays Of Variable Optical Mems Attenuators

Niels Quack, Anton Lagosh
2022
Conference Papers

Abstract

We present design, fabrication and experimental characterization of a multichannel Smart Slit Assembly for next generation spectrometers, based on an array of 40 variable optical attenuators employing MEMS shutters integrated with large core multimode rectangular waveguides. The MEMS actuated shutters are fabricated in a 211 mu m thick device layer of a Silicon-On-Insulator wafer by Deep Reactive Ion Etching. We experimentally demonstrate high shutting efficiency of 99.97% at 532 nm and fast reconfiguration

Official source

https://infoscience.epfl.ch/entities/publication/3fe00e12-8f10-4829-a235-742b32a4eff6

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Multichannel Smart Slit Assembly For Spectroscopy Based On Arrays Of Variable Optical Mems Attenuators

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