Publication

Formation of platinum interconnection lines and periodic structures

Hubert van den Bergh
1993
Journal Articles

Abstract

Laser-induced CVD has been used to produce Pt lines on pyrex glass substrates by means of platinum bis(hexafluoroacetylacetonate) as precursor. The effect that writing speed has on the line geometry and resistivity was studied, as well as the influence of writing speed, precursor vapor pressure, and laser power on periodic structure formation. The results are discussed in terms of laser beam residence time and radiation-induced temp. increase. It is possible to obtain lines with a resistivity very close to that of pure Pt under optimum exptl. conditions.

Official source

https://infoscience.epfl.ch/entities/publication/36001f1e-adfe-4bc1-a8e3-911c06a54f24

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Hubert van den Bergh
1993
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/36001f1e-adfe-4bc1-a8e3-911c06a54f24

About this result

Related concepts (32)

Laser diode

A laser diode (LD, also injection laser diode or ILD, or diode laser) is a semiconductor device similar to a light-emitting diode in which a diode pumped directly with electrical current can create lasing conditions at the diode's junction. Driven by voltage, the doped p–n-transition allows for recombination of an electron with a hole. Due to the drop of the electron from a higher energy level to a lower one, radiation, in the form of an emitted photon is generated. This is spontaneous emission.

Periodic table

The periodic table, also known as the periodic table of the elements, arranges the chemical elements into rows ("periods") and columns ("groups"). It is an organizing icon of chemistry and is widely used in physics and other sciences. It is a depiction of the periodic law, which says that when the elements are arranged in order of their atomic numbers an approximate recurrence of their properties is evident. The table is divided into four roughly rectangular areas called blocks.

Line (geometry)

In geometry, a line is an infinitely long object with no width, depth, or curvature. Thus, lines are one-dimensional objects, though they may exist embedded in two, three, or higher dimensional spaces. The word line may also refer to a line segment in everyday life that has two points to denote its ends (endpoints). A line can be referred to by two points that lie on it (e.g. ) or by a single letter (e.g. ).

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