Publication

MICROFABRICATED RECYCLABLE MOULDS FOR FULL-WAFER STRUCTURING OF CERAMIC PRECURSOR POLYMERS

Vahid Fakhfouri
2006
Reports

Abstract

There is growing interest for new polymer materials and their applications in Micro Electro/Mechanical Systems (MEMS). In this work, we develop recyclable micro-moulds that can be used for microstructuring of new polymer materials, such as precursors and modified or doped polymers. The moulds are made by photopolymerisation of SU8. A sacrificial layer (thickness: 500nm), of aluminum is then sputtered on the moulds. This layer is later removed to release the final structures. The moulds are filled with a liquid ceramic precursor using micropipettes, inkjet or by spin coating.

Official source

https://infoscience.epfl.ch/entities/publication/27ac04f0-f962-4daa-acb6-d442d6d6da43

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Vahid Fakhfouri
2006
Reports

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/27ac04f0-f962-4daa-acb6-d442d6d6da43

About this result

Related concepts (27)

Polymer

A polymer (ˈpɒlᵻmər; Greek poly-, "many" + -mer, "part") is a substance or material consisting of very large molecules called macromolecules, composed of many repeating subunits. Due to their broad spectrum of properties, both synthetic and natural polymers play essential and ubiquitous roles in everyday life. Polymers range from familiar synthetic plastics such as polystyrene to natural biopolymers such as DNA and proteins that are fundamental to biological structure and function.

Ceramic engineering

Ceramic engineering is the science and technology of creating objects from inorganic, non-metallic materials. This is done either by the action of heat, or at lower temperatures using precipitation reactions from high-purity chemical solutions. The term includes the purification of raw materials, the study and production of the chemical compounds concerned, their formation into components and the study of their structure, composition and properties. Ceramic materials may have a crystalline or partly crystalline structure, with long-range order on atomic scale.

Injection moulding

Injection moulding (U.S. spelling: injection molding) is a manufacturing process for producing parts by injecting molten material into a mould, or mold. Injection moulding can be performed with a host of materials mainly including metals (for which the process is called die-casting), glasses, elastomers, confections, and most commonly thermoplastic and thermosetting polymers. Material for the part is fed into a heated barrel, mixed (using a helical screw), and injected into a mould cavity, where it cools and hardens to the configuration of the cavity.

Related publications (14)

MICROFABRICATED RECYCLABLE MOULDS FOR FULL-WAFER STRUCTURING OF CERAMIC PRECURSOR POLYMERS

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Electrical Conductivity Tuning of Polysilazane-Derived Silicon Carbonitride Ceramics