Publication

Freestanding Silicon Photonic Ring and Disk Resonators

Niels Quack, Alain Yuji Takabayashi, Hamed Sattari, Yu Zhang
2019
Conference Papers

Abstract

We report freestanding silicon photonic ring and disk resonators fabricated in a simplified silicon photonics process based on IMEC's iSiPP5OG standard platform that have been released by a custom MEMS post-processing step. Experimental results show high optical Q-factors up to 3.6x10(4) for both ring and disk resonators, and extinction ratios larger than 20 dB. These functional, freestanding resonators demonstrate the compatibility of MEMS processing within a silicon photonics platform and open the possibility for large-scale integration of more complex photonic devices.

Official source

https://infoscience.epfl.ch/entities/publication/27794067-ad4d-4118-af8e-fe008a44279d

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Freestanding Silicon Photonic Ring and Disk Resonators

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