Publication

Suspended acoustic wave resonator comprising buried electrodes

2026

Abstract

An acoustic wave resonator (1) according to the present invention comprises: a base substrate (10); a piezoelectric substrate (2) placed on top of the base substrate (10) such that the piezoelectric substrate (2) has a suspended portion above the base substrate (10); a set of electrodes buried in the suspended portion of the piezoelectric substrate (2) and forming an interdigital transducer (4), the electrodes cross-sectionally extending in the piezoelectric substrate (2) between an upper surface and a lower surface of the piezoelectric substrate (2) in a thickness direction of the piezoelectric substrate (2); and a set of electrical contact elements (5<sub>1</sub>, 5<sub>2</sub>) connected to the interdigital transducer (4). the electrodes only partially span through the piezoelectric substrate (2) in the thickness direction of the piezoelectric substrate (2).

Official source

https://infoscience.epfl.ch/entities/publication/19db3665-c8c7-41d0-a49a-380ca0700710

About this result

This page is automatically generated and may contain information that is not correct, complete, up-to-date, or relevant to your search query. The same applies to every other page on this website. Please make sure to verify the information with EPFL's official sources.

Graph Chat

Chat with Graph Search

Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.

DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.

2026

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/19db3665-c8c7-41d0-a49a-380ca0700710

About this result

Related concepts (28)

Electrode

An electrode is an electrical conductor used to make contact with a nonmetallic part of a circuit (e.g. a semiconductor, an electrolyte, a vacuum or air). Electrodes are essential parts of batteries that can consist of a variety of materials depending on the type of battery. The electrophore, invented by Johan Wilcke, was an early version of an electrode used to study static electricity. Electrodes are an essential part of any battery. The first electrochemical battery made was devised by Alessandro Volta and was aptly named the Voltaic cell.

Thin-film bulk acoustic resonator

A thin-film bulk acoustic resonator (FBAR or TFBAR) is a device consisting of a piezoelectric material manufactured by thin film methods between two conductive – typically metallic – electrodes and acoustically isolated from the surrounding medium. The operation is based on the piezoelectricity of the piezolayer between the electrodes. FBAR devices using piezoelectric films with thicknesses ranging from several micrometres down to tenths of micrometres resonate in the frequency range of 100 MHz to 20 GHz.

Reference electrode

A reference electrode is an electrode that has a stable and well-known electrode potential. The overall chemical reaction taking place in a cell is made up of two independent half-reactions, which describe chemical changes at the two electrodes. To focus on the reaction at the working electrode, the reference electrode is standardized with constant (buffered or saturated) concentrations of each participant of the redox reaction. There are many ways reference electrodes are used.

Related publications (1)

Suspended acoustic wave resonator comprising buried electrodes

Chat with Graph Search

Electrochemical oxidation of manganese(II) to permanganate (MnO4-) in the presence of silver(I) catalyst