Publication

Control of CVD-deposited ZnO films properties through water/DEZ ratio: Decoupling of electrode morphology and electrical characteristics

Christophe Ballif
2012
Journal Articles

Abstract

In thiswork,itisshownthatvariationsintheratioofoxygentozincprecursorsatconstant temperatureallowchangingthesurfacemorphologyofzincoxide(ZnO)filmsdepositedbylow- pressuremetalorganicchemicalvapordeposition,whilekeepingthesheetresistanceandtransparency of thelayersconstant.ThisallowsdevelopingZnOlayerscombininginterestingpropertiessuchaslow surface roughness(below15nm)andlowsheetresistance(below15 O/&). Moregenerally,itisshown that thepyramidalfeaturedensitycanbecontrolledbytuningtheprecursorflows.Thisleadstofilm surfacescharacterizedbyzoneswitharoughmorphologymixedwithzoneswithalmostflatfeatures. Therefore,byusingthistechnique,thelight-scatteringabilityofafilmcanbecarefullytunedthrough its surfacemorphologywithoutaffectingtheconductivityortransparencyofthelayer.Thisprovidesan efficienttooltooptimizethefrontelectrodeofthin-filmsiliconsolarcellstoachievethebestpossible combinationofopen-circuitvoltage,fillfactorandphoto-generatedcurrent.Thepresentedsolutionis an in-situprocessachievableinstandarddepositionconditionsmakingiteasilyup-scalablewith existingproductionequipment.

Official source

https://infoscience.epfl.ch/entities/publication/0f59029e-0874-419b-b9f0-b1ada8e28da2

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Christophe Ballif
2012
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/0f59029e-0874-419b-b9f0-b1ada8e28da2

About this result

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Control of CVD-deposited ZnO films properties through water/DEZ ratio: Decoupling of electrode morphology and electrical characteristics

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