Publication

Submicrometer Hall devices fabricated by focused electron-beam-induced deposition

Jürgen Brugger, Patrik Willi Hoffmann, Giovanni Boero, Niels Quack, Radivoje Popovic, Pavel Kejik, Schahrazede-Lila Mouaziz, Tristan Bret
2005
Journal Articles

Abstract

Hall devices having an active area of about (500 nm)(2) are fabricated by focused electron-beam-induced deposition. The deposited material consists of cobalt nanoparticles in a carbonaceous matrix. The realized devices have, at room temperature, a current sensitivity of about 1 V/AT, a resistance of a few kilo-ohms, and can be biased with a maximum current of about 1 mA. The room-temperature magnetic field resolution is about 10 muT/Hz(1/2) at frequencies above 1 kHz.

Official source

https://infoscience.epfl.ch/entities/publication/0e1e5293-020c-4c9f-b4bd-b699a2fa7b1e

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Submicrometer Hall devices fabricated by focused electron-beam-induced deposition

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