Publication

Piezoelectric and dielectric properties of sputter deposited (111), (100) and random-textured Pb(ZrxTi1-x)O-3 (PZT) thin films

Paul Muralt
1999
Journal Articles

Abstract

Highly textured PZT(111), PZT(001/100) and random PZT films have been grown on Pt and RuO2 bottom electrodes by means of an in-situ, multimagnetron reactive sputtering process with three metal targets (Pb, Zr, Ti). The orientation was varied with the bottom electrode/PZT initial interlayer deposition conditions. Series of 300 nm thick films with varying composition x have been prepared. The Ti and Zr ratio was changed by adjusting the powers of the corresponding targets. The lead content was self stabilized by the process at the deposition temperature of 570 degrees C. Polarization, dielectric and piezoelectric properties were studied. Coercive field, built-in electric field and unswitchable polarization for Ti-rich compositions have been determined by polarisation hysteresis loops.

Official source

https://infoscience.epfl.ch/entities/publication/0d687152-10c8-492b-a20b-a3f60e4eb7ce

About this result

This page is automatically generated and may contain information that is not correct, complete, up-to-date, or relevant to your search query. The same applies to every other page on this website. Please make sure to verify the information with EPFL's official sources.

Graph Chat

Chat with Graph Search

Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.

DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.

Paul Muralt
1999
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/0d687152-10c8-492b-a20b-a3f60e4eb7ce

About this result

Related concepts (32)

Piezoelectricity

Piezoelectricity (ˌpiːzoʊ-,_ˌpiːtsoʊ-,_paɪˌiːzoʊ-, piˌeɪzoʊ-,_piˌeɪtsoʊ-) is the electric charge that accumulates in certain solid materials—such as crystals, certain ceramics, and biological matter such as bone, DNA, and various proteins—in response to applied mechanical stress. The word piezoelectricity means electricity resulting from pressure and latent heat. It is derived (an ancient source of electric current). The piezoelectric effect results from the linear electromechanical interaction between the mechanical and electrical states in crystalline materials with no inversion symmetry.

Physical vapor deposition

Physical vapor deposition (PVD), sometimes called physical vapor transport (PVT), describes a variety of vacuum deposition methods which can be used to produce thin films and coatings on substrates including metals, ceramics, glass, and polymers. PVD is characterized by a process in which the material transitions from a condensed phase to a vapor phase and then back to a thin film condensed phase. The most common PVD processes are sputtering and evaporation.

Thin film

A thin film is a layer of material ranging from fractions of a nanometer (monolayer) to several micrometers in thickness. The controlled synthesis of materials as thin films (a process referred to as deposition) is a fundamental step in many applications. A familiar example is the household mirror, which typically has a thin metal coating on the back of a sheet of glass to form a reflective interface. The process of silvering was once commonly used to produce mirrors, while more recently the metal layer is deposited using techniques such as sputtering.

Related publications (32)

Piezoelectric and dielectric properties of sputter deposited (111), (100) and random-textured Pb(ZrxTi1-x)O-3 (PZT) thin films

Chat with Graph Search

Polarization Enhanced GaN SBDs with p-NiO/LiNiO Junction Termination Extensions Achieving 1 kV Breakdown Voltage

Long-term protection of crystalline zinc phosphide (Zn3P2) under atmospheric conditions

A 2D3V PIC-MCC model for simulating electrostatic discharging on charged spacecraft under high power microwave