Publication

Integrated electronic device with embedded microchannels and a method for producing thereof

Elison de Nazareth Matioli, Remco Franciscus Peter van Erp
2021
Patents

Abstract

The present invention relates to a method for fabricating an integrated electronic device with a microchannel, comprising the steps of: - Providing a homogeneous or heterogeneous substrate with one or more layers of material, respectively; - Forming at least one trench in the upper surface and through the upper layer using an etching process, particularly using a high aspect ratio etching process; - Sealing the trench by closing the opening of the trench on an upper surface of the upper layer.

Official source

https://infoscience.epfl.ch/entities/publication/09755766-5c06-4b91-8d9a-cfaf678a69de

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Integrated electronic device with embedded microchannels and a method for producing thereof

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