Publication

Fabrication and characterization of 3D integrated 2 DOF Micromirror Arrays for excessive thermal loads

Nico de Rooij
2011
Conference Papers

Abstract

This paper reports a high fill-factor (>90%), 2-dimensional analog micromirror array designed specifically for very high, optically induced thermal load applications. Each pixel can attain a mechanical DC rotation angle of ±4 degrees around any arbitrary axis with 170V excitation. The maximum temperature rise on the mirror surface with 7 KW/m2 thermal load under 1 Pa ambient pressure is below 230 °C. A detailed assessment of the fabrication process –including the poly-Si vertical electrodes, wafer level mirror bonding, and copper electroplating of structural layers–, and characterization methodology is presented with experimental results.

Official source

https://infoscience.epfl.ch/entities/publication/012ebceb-2241-40f7-82bb-b2788b8d8574

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Nico de Rooij
2011
Conference Papers

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/012ebceb-2241-40f7-82bb-b2788b8d8574

About this result

Related concepts (32)

Mirror

A mirror or looking glass is an object that reflects an . Light that bounces off a mirror will show an image of whatever is in front of it, when focused through the lens of the eye or a camera. Mirrors reverse the direction of the image in an equal yet opposite angle from which the light shines upon it. This allows the viewer to see themselves or objects behind them, or even objects that are at an angle from them but out of their field of view, such as around a corner.

Electric motor

An electric motor is an electrical machine that converts electrical energy into mechanical energy. Most electric motors operate through the interaction between the motor's magnetic field and electric current in a wire winding to generate force in the form of torque applied on the motor's shaft. An electric generator is mechanically identical to an electric motor, but operates with a reversed flow of power, converting mechanical energy into electrical energy.

Mirror image

A mirror image (in a plane mirror) is a reflected duplication of an object that appears almost identical, but is reversed in the direction perpendicular to the mirror surface. As an optical effect it results from reflection off from substances such as a mirror or water. It is also a concept in geometry and can be used as a conceptualization process for 3-D structures. Reflectional symmetry In geometry, the mirror image of an object or two-dimensional figure is the formed by reflection in a plane mirror; it is of the same size as the original object, yet different, unless the object or figure has reflection symmetry (also known as a P-symmetry).

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Fabrication and characterization of 3D integrated 2 DOF Micromirror Arrays for excessive thermal loads

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