Publication

A highly sensitive a-Si photodetector array with integrated filter for optical detection in MEMS

Pierre-André Farine, Steve Tanner, Mohssen Moridi
2009
Conference Papers

Abstract

This paper presents a highly sensitive photo-detector array deposited on a glass substrate with an integrated optical filter. The active element is a vertically integrated hydrogenated amorphous silicon photodiode featuring a dark current of less than 1e-10 A/cm2 for -3V bias voltage and a maximal quantum efficiency of 80% near 580 nm. The prototype was encapsulated and tested optically. It has a fill factor of only 44% which, however, can be easily increased to 90% using flip-chip bonding to an integrated electronic circuit for signal conditioning. The sensor is bio-compatible and can be integrated with other glass-based MEMS devices.

Official source

https://infoscience.epfl.ch/entities/publication/0069bfb7-784d-446c-b9f1-6425b020d52b

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Pierre-André Farine, Steve Tanner, Mohssen Moridi
2009
Conference Papers

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/0069bfb7-784d-446c-b9f1-6425b020d52b

About this result

Related concepts (32)

Integrated circuit

An integrated circuit or monolithic integrated circuit (also referred to as an IC, a chip, or a microchip) is a set of electronic circuits on one small flat piece (or "chip") of semiconductor material, usually silicon. Large numbers of miniaturized transistors and other electronic components are integrated together on the chip. This results in circuits that are orders of magnitude smaller, faster, and less expensive than those constructed of discrete components, allowing a large transistor count.

Electronic circuit

An electronic circuit is composed of individual electronic components, such as resistors, transistors, capacitors, inductors and diodes, connected by conductive wires or traces through which electric current can flow. It is a type of electrical circuit and to be referred to as electronic, rather than electrical, generally at least one active component must be present. The combination of components and wires allows various simple and complex operations to be performed: signals can be amplified, computations can be performed, and data can be moved from one place to another.

Photonic integrated circuit

A photonic integrated circuit (PIC) or integrated optical circuit is a microchip containing two or more photonic components which form a functioning circuit. This technology detects, generates, transports, and processes light. Photonic integrated circuits utilize photons (or particles of light) as opposed to electrons that are utilized by electronic integrated circuits. The major difference between the two is that a photonic integrated circuit provides functions for information signals imposed on optical wavelengths typically in the visible spectrum or near infrared (850–1650 nm).

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A highly sensitive a-Si photodetector array with integrated filter for optical detection in MEMS

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