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Wilfried Noell

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Related publications (35)

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Correction of surface error occurring in microlenses characterization performed by optical profilers

Toralf Scharf, Wilfried Noell, Jeremy Béguelin

Characterizing the surface of microlenses by optical profilers has the important advantages of measurement speed, flexibility and automation. Nevertheless, the accuracy of such characterization is limited by error occurring in non-flat measurements. Here, ...

SPIE-INT SOC OPTICAL ENGINEERING2019

Improved calibration of vertical scanning optical profilometers for spherical profiles measurements

Toralf Scharf, Wilfried Noell, Jeremy Béguelin

A new method for calibrating optical scanning profilometers is presented. Especially adapted to spherical and aspherical profile measurements, it shows an increase of accuracy bigger than one order of magnitude for radius of curvature measurements. Calibra ...

2018

A dual-axis pointing mirror with moving-magnet actuation

Nico de Rooij, Wilfried Noell, Caglar Ataman, Sébastien Lani

A large-aperture and large-angle MEMS-based 2D pointing mirror is presented. The device is electromagnetically actuated by a moving-magnet/stationary-coil pair and potentially suited for high power laser beam shaping and beam pointing applications, such as ...

Institute of Physics2013

Enabling proximity mask-aligner lithography with a 193nm CW light source

Toralf Scharf, Wilfried Noell, Raoul Kirner

We introduce a novel industrial grade 193nm continuous-wave laser light source for proximity mask-aligner lithography. A diode seed laser in master-oscillator power-ampliﬁcation conﬁguraton is frequency-quadrupled using lithiumtriborate and potassium-ﬂuoro ...

2018

Design, simulation, fabrication, packaging, and characterization of a MEMS-based mirror array for femtosecond pulse-shaping in phase and amplitude

Nico de Rooij, Wilfried Noell, Luigi Bonacina, Jérôme Extermann, Sébastien Lani, Fabio Jutzi

We present an in-detail description of the design, simulation, fabrication, and packaging of a linear micromirror array specifically designed for temporal pulse shaping of ultrashort laser pulses. The innovative features of this device include a novel comb ...

American Institute of Physics2011

Interferometric study on Gouy phase anomaly of microlens array

Hans Peter Herzig, Toralf Scharf, Wilfried Noell, Myun Sik Kim

We investigate the Gouy phase anomaly of light in the focus of refractive plano-convex microlens arrays by using longitudinal-differential (LD) interferometry and a finite-difference time-domain (FDTD) simulation. We put emphasis on determining the amount ...

Spie-Int Soc Optical Engineering2015

Improving the resolution in mask-aligner lithography

Toralf Scharf, Wilfried Noell, Raoul Kirner

For the back-end microfabrication in integrated circuits and for the manufacturing of light emitting diodes, proximity mask-aligner lithography is still the tool of choice, due to its simplicity and low costs. However, the downscaling of functional element ...

IEEE2018

Large micromirror array designed and tested for Multi-Object Spectroscopy

Wilfried Noell, Michael David Canonica

MEMS-based programmable slit masks are developed for multi-object spectroscopy in astronomy. Devices with 2048 tiltable micromirrors were fabricated and tested, exhibiting very good surface flatness, high contrast and cryogenic operation ability. ...

Ieee2012

Fabrication and characterization of linear diffusers based on concave micro lens arrays

Nico de Rooij, Hans Peter Herzig, Toralf Scharf, Wilfried Noell, Roland Andreas Bitterli

We present a new approach of beam homogenizing elements based on a statistical array of concave cylindrical microlens arrays. Those elements are used to diffuse light in only one direction and can be employed together with fly’s eye condensers to generate ...

Optical Society of America2010

The two-dimensional array of 2048 tilting micromirrors for astronomical spectroscopy

Nico de Rooij, Wilfried Noell, Michael David Canonica

In multi-object spectrometers, field selectors, which are located in the focal plane of the telescopes, are required for the selection of astronomical objects, such as stars or faint galaxies. We present a two-dimensional micromirror array as a field selec ...

Institute of Physics2013

6Dynamic MEMS-based linear (1D) diffusers for laser beam homogenizing and beam shaping

Nico de Rooij, Wilfried Noell, Jonathan Masson

2009

Tunable MEMS-based Optical Linear(1D)Diffusers for Dynamic Laser Beam Shaping and Homogenizing

Nico de Rooij, Wilfried Noell, Jonathan Masson

2009

Scalable cascaded snap-in actuators for large-stroke displacements

Nico de Rooij, Wilfried Noell, Yves Pétremand, Nicolas Bernard Golay

This paper will focus on the design, and first measurements of a cascaded in-plane parallel plate snap-in actuator. The actuator is based on a rather simple microfabrication process and can achieve a total displacement of several tenths of microns. Compare ...

2009

Computational rule-based approach for corner correction of non-Manhattan geometries in mask aligner photolithography

Toralf Scharf, Wilfried Noell, Chen Yan, Raoul Kirner

In proximity mask aligner photolithography, diffraction of light at the mask pattern is the predominant source for image shape distortions such as line end shortening and corner rounding. One established method to mitigate the impact of diffraction is opti ...

2019

Dynamic array spot shaping for laser micro machining

Toralf Scharf, Wilfried Noell, Roland Andreas Bitterli, Jonathan Masson

2009