Publications by Jürgen Brugger

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NMR spectra of mammalian cells are taken using surface microprobes that are based on microfabricated planar coils. The surface microprobe resembles a miniaturized Petri dish commonly used in biological research. The diameter of the planar coils is 1 mm. Ch ...

A high sensitivity field asymmetric ion mobility spectrometer (FAIMS) was designed, fabricated, and tested. The main components of the system are a 10.6 eV UV photoionization source, an ion filter driven by a high voltage/high frequency n-MOS inverter circ ...

Self-assembly (SA) is a bio-inspired key coordination mechanism for swarms of intelligent agents as well as a pervasive bottom-up methodology for the fabrication of heterogeneous micro- and nanosystems. Analytical studies of SA at small scales are therefor ...

In this paper a nano-molding process using a nature-created master is demonstrated. The eye of night moth Agotis exclamationis having 100 nm-scale structures on a curved surface is used as biomimetic master mold from which nanostructures are replicated ont ...

A microscopic four-point probe (u4PP) for resistivity measurements on thin films was designed and fabricated using the negative photoresist SU-8 as base material. The device consists of four microscopic cantilevers, each of them supporting a probe tip at t ...

We report on the patterning and characterization of titanium–gold (Ti–Au) wire test structures on polyethylene naphthalate (PEN), polyethylene terephthalate (PET) and polyimide (PI) substrates. PEN, PET and PI are flexible polymers which can withstand stre ...

We present a new transparent high-performance triboelectric microgenerator (TEMG) based on an emerging material, silk fibroin. Silk fibroin has a strong ability to lose electrons and occupies a top-level positive position in the triboelectric series. It th ...

In article number 1903051, Matthieu Rüegg, Juergen Brugger, and co-workers design, fabricate, and characterize biodegradable magnesium microresonators using an innovative microfabrication process based on ion beam etching. Under a radio-frequency magnetic ...

Self-assembly is a key coordination mechanism for large multi-unit systems and a powerful bottom-up technology for micro/nanofabrication. Controlled self-assembly and dynamic reconfiguration of large ensembles of microscopic particles can effectively bridg ...

A moire is an interference pattern that appears when two different periodic structures are overlaid. The image created is extremely sensitive to small variations in the original layers and is thus very interesting for anti-counterfeit protection. We presen ...

We present a MEMS process for the fabrication of arbitrary (adaptable to specific aperture geometries) stabilization of silicon nitride membranes to be used as miniature shadow masks or (nano) stencils. Stabilization was realized by the fabrication of sili ...

Wafer-scale nanostencil lithography (nSL) is used to define several types of silicon mechanical resonators, whose dimensions range from 20 μm down to 200 nm, monolithically integrated with CMOS circuits. We demonstrate the simultaneous patterning by nSL of ...

Atomically thin materials, such as graphene and transition metal dichalcogenides, are promising candidates for future applications in micro/nanodevices and systems. For most applications, functional nanostructures have to be patterned by lithography. Devel ...

Stencil lithography (SL), which uses a perforated membrane as a reusable shadow mask to locally add material patterns on substrates provides a simple but versatile approach for the fabrication of functional devices on a large variety of substrate materials ...

We fabricated amorphous silicon n-i-p solar cells with two types of nanopatterned back reflectors using stencil lithography. One reflector type has a plasmonic grating that is embedded in the ZnO layer; the other one has a metallic grating patterned on top ...

A rapid acquisition method for two-dimensional (2D) magnetic resonance force microscopy images is described. Spatial resolution is based on gradients in the static magnetic field B0 and in the applied radiofrequency field B1. Hadamard- and Fourier-encoding ...

We present the fabrication process and electrical characterization of sub-100 nm scale Al nanowires (NWs) fabricated by stencil lithography (SL). We use a stencil with sub- 100 nm wide nanoslits patterned by focused ion beam (FIB) milling. The stencil is a ...

Stencil lithography (SL) is a shadow mask based technique which allows parallel, resistless, micro- and nano-patterning of material through apertures in a membrane (stencil) onto a substrate [1]. The stencils are usually made of LPCVD low-stress SiN due to ...

An innovative release method of polymer cantilevers with embedded integrated metal electrodes is presented. The fabrication is based on the lithographic patterning of the electrode layout on a wafer surface, covered by two layers of SU-8 polymer: a 10-um-t ...

This paper presents new results on miniaturized organic thin film transistors (TFT) fabricated on a spin coated polyimide (PI) film. Patterning steps, that are vital for the integrity and electrical performances of the organic TFT, were performed using res ...

Jürgen Brugger

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NMR spectroscopy and perfusion of mammalian cells using surface microprobes

High sensitivity field asymmetric ion mobility spectrometer

Three-dimensional polymeric microtiles for optically-tracked fluidic self-assembly

Biomimetic soft lithography on curved nanostructured surfaces

Microscopic four-point probe based on SU-8 cantilevers

Resistivity Measurements of Gold Wires Fabricated by Stencil Lithography on Flexible Polymer Substrates

A transparent silk-fibroin-based triboelectric microgenerator for airflow energy harvesting

Transient Electronics: Biodegradable Frequency‐Selective Magnesium Radio‐Frequency Microresonators for Transient Biomedical Implants (Adv. Funct. Mater. 39/2019)

Automated Real-Time Control of Fluidic Self-Assembly of Microparticles

High-resolution 1D moirés as counterfeit security features

Corrugated membranes for improved pattern definition with micro/nanostencil lithography

Full-wafer fabrication by nanostencil lithography of micro/nanomechanical mass sensors monolithically integrated with CMOS

Thermomechanical Nanocutting of 2D Materials

Nanobridge Stencil Enabling High Resolution Arbitrarily Shaped Metallic Thin Films on Various Substrates

Stencil-nanopatterned back reflectors for thin-film amorphous silicon n-i-p solar cells

Two-dimensional magnetic resonance force microscopy using full-volume Fourier and Hadamard encoding

Sub-100 nm-scale Aluminum Nanowires by Stencil Lithography: Fabrication and Characterization

Robust PECVD SiC membrane made for stencil lithography

Polymer-based cantilevers with integrated electrodes

Organic Thin Film Transistors on Flexible Polyimide Substrates Fabricated by Full Wafer Stencil Lithography