Publication

Resistivity Measurements of Gold Wires Fabricated by Stencil Lithography on Flexible Polymer Substrates

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Andreea Veronica Savu, Oscar Vazquez Mena, Marc Antonius Friedrich van den Boogaart, Katrin Sidler Arnet
2008
Conference Papers

Abstract

We report on the patterning and characterization of titanium–gold (Ti–Au) wire test structures on polyethylene naphthalate (PEN), polyethylene terephthalate (PET) and polyimide (PI) substrates. PEN, PET and PI are flexible polymers which can withstand stress and strain. The used patterning method is stencil lithography, a resistless patterning method and based on the shadow mask technique. From the electrical characterization, the resistivity of the Ti–Au wires on the different flexible substrates was determined.

Official source

https://infoscience.epfl.ch/entities/publication/80429c85-641e-4303-94cf-d78c479ec7cf

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Resistivity Measurements of Gold Wires Fabricated by Stencil Lithography on Flexible Polymer Substrates

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