Publications by Paul Muralt | EPFL Graph Search

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In this work, we study MgF2 thin-film synthesis by reactive pulsed DC magnetron sputtering from a metallic magnesium target in a gas mixture of argon, oxygen, and carbon tetrafluoride (CF4). Nanocrystalline films on silicon and glass substrates with excell ...

Micro solid oxide fuel cells (μ-SOFCs) based on MEMS fabrication processes have become an increasingly attractive option for portable power generation applications, due to their high power density and their compatibility with hydrocarbon fuels. For system packaging, the silicon-based fuel cell membrane module needs to be integrated together with other functional elements such as the gas processing unit and the post-combustor. Silicon wafer bonding techniques can be utilized to avoid thermo-mechanical stress

Low temperature micro-solid oxide fuel cell (micro-SOFC) systems are an attractive alternative power source for small-size portable electronic devices due to their high energy efficiency and density. Here, we report a thermally self-sustainable reformer – ...

Recently, the development of micro-scale solid oxide fuel cells (µ-SOFCs) has become a promising research topic in the area of portable energy production. A µ-SOFC system, which can provide 1 to 2 W electrical power under an operating temperature of 550°C 1-2, mainly consists of a fuel processor, an electrochemical power generator, and a post combustor. The role of the fuel processor is to generate a hydrogen-rich product stream that is fed to the power generation module. In previous works, various micromac

An integrated system of a microreformer and a carrier allowing for syngas generation from liquefied petroleum gas (LPG) for micro-SOFC application is discussed. The microreformer with an overall size of 12.7 mm × 12.7 mm × 1.9 mm is fabricated with micro-e ...

The miniaturized solid oxide fuel cells (µ-SOFCs) has become an intensively studied device for portable power generation technology due to its wide choice of hydrocarbon fuels, its high energy density and its great operation efficiency. It is being considered as a battery replacement [1]. The µ-SOFC system, which aims to provide electrical energy (≤ 10 W) at an operating temperature of ca. 550°C, consists of a fuel cell unit for the electrochemical conversion [2-3]; a fuel processing unit for the thermal st

Gadolinium doped ceria is a well-known oxygen ion conduction material for solid fuel cell electrolytes. With its centrosymmetric average lattice and relatively low bulk dielectric constant it does not look interesting for electromechanical applications. Ho ...

Interdigitated electrode (IDE) systems with lead zirconate titanate (PZT) thin films play an increasingly important role for two reasons: first, such a configuration generates higher voltages than parallel plate capacitor-type electrode (PPE) structures, a ...

In this paper, we demonstrate the fabrication of contour-mode resonators (CMRs) with Al0.83Sc0.17N as a piezoelectric layer. Moreover, we assess the electromechanical coupling and the maximum achieved quality factor from 150 to 500 MHz. In comparison to pu ...

Highlights • A “plug-and-play” microreaction system for high-temperature reactions (>500 °C). • Efficient thermal decoupling for using standard electrical/fluidic connections. • Automatic and accurate temperature control for calorimetric measurements. • A ...

Micro-scale solid oxide fuel cells (μ-SOFCs) based on microfabrication processes have been found to be interesting as a battery replacement for portable power generation. The system consists of a fuel cell element, a fuel processing unit, a thermal control system and packaging for the electrical and fluidic connections as well as for mechanical support. The system is capable of operating above 500°C under both oxidizing and reducing atmospheres. Due to the relatively large size, complex fluidics and silicon

The method for group manufacturing of pyroelectric sensors by forming a thin pyroelectric layer on the upper side of a silicon wafer, where each sensor comprises several pixels (4) and each pixel is defined by an upper electrode (6) situated on the face si ...

Micro solid-oxide fuel cells (μ-SOFCs) based on microfabrication processes are a promising alternative to batteries for supplying portable electronics, as very high energy densities may be achieved. However, a complete μ-SOFC module is a quite intricate structure, comprising 1) a gas-processing unit (GPU) to process a convenient energy source such as lighter gas into a more usable form, 2) the energy-generating cells proper, and 3) a post-combustor. The mechanical integration of these elements and their flu

Complex oxide heterointerfaces contain a rich playground of novel physical properties and functionalities, which give rise to emerging technologies. Among designing and controlling the functional properties of complex oxide film heterostructures, verticall ...

AIN is a material used in a wide variety of applications such as electroacoustic devices, blue diodes, IR windows, thermal conductors, metal-insulator-semiconductor structures, integrated circuit packaging, etc. In this work thin piezoelectric AIN polycrystalline films have been grown on Si and SiO2 using rf magnetron sputter deposition in an Ar/N-2 gas mixture. The structural properties of the film have been optimized by varying the deposition parameters, such as process pressure, gas mixture, substrate te

A systematic study was carried out to assess property changes in CaCu3Ti4O12 thin films upon annealing in air in order to evaluate the impact of oxygen vacancies on their colossal dielectric constant behavior. Highly preferentially oriented thin-film sampl ...

Piezoelectric wurtzite ScxAl1-xN (x = 0, 0.1, 0.2, 0.3) thin films were epitaxially grown by reactive magnetron co-sputtering from elemental Sc and Al targets. Al2O3(0001) wafers with TiN(111) seed and electrode layers were used as substrates. X-ray diffra ...

Enhancing the efficiency of micro-energy conversion devices through engineering of the structure-transport relationship is a prerequisite toward next generation micro-electrolysers and fuel cells. Here, oxygen ion conducting free-standing thin films are ke ...

Pyroelectric materials are very promising for thermal energy harvesting applications. To date, lead-based systems are the foremost studied materials in this field. A facile and simple metal organic chemical vapor deposition route is applied for the fabrica ...

A novel piezoelectric thin-film accelerometer has been designed and its performance has been analysed. The piezoelectric thin film (PZT for example) is delineated into an array of pads to reduce the sensor capacitance. By filling the cavity around the PZT pads either with a polymer or a gas with controlled pressure, damping can be controlled. The piezoelectric thin-film material (i.e., pads) is clamped between a seismic mass and a base plate (silicon substrate). During acceleration in the axial direction th

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Nanocrystalline Low-Refractive Magnesium Fluoride Films Deposited by Reactive Magnetron Sputtering: Optical and Structural Properties

An evaluation of thick-film silver die-attach as micro solid oxide fuel cells (μ-SOFCs) interconnection packaging

A thermally self-sustained micro-power plant with integrated micro-solid oxide fuel cells, micro-reformer and functional micro-fluidic carrier

A novel fuel processing platform for micro-scale solid oxide fuel cells

Syngas generation from n-butane with an integrated MEMS assembly for gas processing in micro-solid oxide fuel cell systems

Development of a low temperature co-fired ceramic fuel processor for the micro-scale solid oxide fuel cell system

Key-features in processing and microstructure for achieving giant electrostriction in gadolinium doped ceria thin films

Measurement of effective piezoelectric coefficients of PZT thin films for energy harvesting application with interdigitated electrodes

Al0.83Sc0.17N Contour-Mode Resonators With Electromechanical Coupling in Excess of 4.5%

Design and packaging of a highly integrated microreactor system for high-temperature on-board hydrogen production

A new platform concept for micro-scale SOFC using low temperature co-fired ceramic technology

Fabrication de capteurs pyroelectriques comprenant une couche pyroelectrique mince necessitant une polarisation electrique

Ceramic modules for micro solid-oxide fuel cells

Controlled Electronic and Magnetic Landscape in Self-Assembled Complex Oxide Heterostructures

Structural and electroacoustic studies of AIN thin films during low temperature radio frequency sputter deposition

Annealing effects on electrical properties and defects of CaCu_{3}Ti_{4}O_{12} thin films deposited by pulsed laser deposition

Microstructure and dielectric properties of piezoelectric magnetron sputtered w-ScxAl1-xN thin films

Micro-solid state energy conversion membranes: influence of doping and strain on oxygen ion transport and near order for electrolytes

Self-Poled Heteroepitaxial Bi(1-x)DyxFeO3 Films with Promising Pyroelectric Properties

Design of a novel thin-film piezoelectric accelerometer