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Lecture

Electron Microscopy: Basics and Techniques

In course

MICRO-428: Metrology

The course deals with the concept of measuring in different domains, particularly in the electrical, optical, and microscale domains. The course will end with a perspective on quantum measurements, which could trigger the ultimate revolution in metrology. ...

Description

This lecture covers the fundamental components of electron microscopes, including electron sources, lenses, and detectors. It explains the interactions of electrons with samples, the working principles of SEM, TEM, and FIB, and the factors influencing resolution. The advantages of each technique, sample requirements, and preparation methods are discussed. Imaging modes such as SE, BS, and EDX in SEM are explained, along with nanofabrication methods using SEM/FIB. The session also delves into the correlation of AFM with SEM and showcases applications like stiffness tomography and 3D imaging.

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Instructors (3)

Georg Fantner

Claudio Bruschini

Claudio Bruschini holds an MSc in high energy physics from the University of Genova and a PhD in Applied Sciences from the Vrije Universiteit Brussel (VUB). He started his career with INFN (Italy, 1993), in the WA92 CERN collaboration (particle physics), and then moved to CERN as a Fellow in the European GP-MIMD2 project, attached to the NA48 collaboration (particle physics, parallel programming, 1994-1995). He then started his close collaboration with EPFL, first in the DeTeC (Demining Technology Center) project (sensors for landmine detection/humanitarian demining, 1996-1997). After DeTeC's end, he started the first of a series of fruitful collaborations with the Vrije Universiteit Brussel (VUB) on humanitarian demining related R&D (1998). This was followed by the EUDEM survey project (The European Union in Humanitarian Demining, 1998), the EUDEM2 three year EC sponsored support measure (www.eudem.info, 2001-2004), and the DELVE support action (www.delve.vub.ac.be, 2007). In parallel he started working within the EPFL's AQUA group (Advanced Quantum Architectures, Edoardo Charbon), on topics as diverse as ultrasonic sensors for in-air application, optical 3D and high speed 2D sensing, sensor networks, or tracking/motion capture systems, in particular for the preparation of research projects. This culminated in the European MEGAFRAME (www.megaframe.eu, FP6, 2006-2010, SPAD arrays and related in-pixel time stamping electronics in deep submicron CMOS technology) and SPADnet (www.spadnet.eu, FP7, 2010-2014, networked SPAD arrays for Positron Emission Tomography) projects, coordinated by EPFL-AQUA. As from 2009 he also worked with Dario Floreano on the management of the CURVACE Curved Artificial Compound Eyes FP7 project (www.curvace.org), coordinated by EPFL-LIS. He was also active with CHUV (Lausanne University Hospital) within EndoTOFPET-US (endoscopic PET) as well as on a CTI project devoted to the development of a new hand-held standalone tool for tracer-guided medical procedures. In 2014 he had also the pleasure of joining the EPFL ICLAB of Christian Enz during its ramp-up phase, collaborating on device related topics (SNF GigaRadMOST) and biomedical R&D (NanoTera WiseSkin). Claudio is now fully with EPFL’s Advanced Quantum Architecture (AQUA). He has also been active as independent scientific consultant, under the label CBR Scientific Consulting, on the preparation of (European) R&D project proposals and the execution of individual studies, and worked in 2006 for a local start-up as operations manager and R&D advisor.... but this is another story. An unauthorized early biography is available at http://lami.epfl.ch/team/claudiob/...

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Related concepts (32)

Transmission electron microscopy

Transmission electron microscopy (TEM) is a microscopy technique in which a beam of electrons is transmitted through a specimen to form an image. The specimen is most often an ultrathin section less than 100 nm thick or a suspension on a grid. An image is formed from the interaction of the electrons with the sample as the beam is transmitted through the specimen. The image is then magnified and focused onto an imaging device, such as a fluorescent screen, a layer of photographic film, or a sensor such as a scintillator attached to a charge-coupled device.

Scanning electron microscope

A scanning electron microscope (SEM) is a type of electron microscope that produces images of a sample by scanning the surface with a focused beam of electrons. The electrons interact with atoms in the sample, producing various signals that contain information about the surface topography and composition of the sample. The electron beam is scanned in a raster scan pattern, and the position of the beam is combined with the intensity of the detected signal to produce an image.

Cryogenic electron microscopy

Cryogenic electron microscopy (cryo-EM) is a cryomicroscopy technique applied on samples cooled to cryogenic temperatures. For biological specimens, the structure is preserved by embedding in an environment of vitreous ice. An aqueous sample solution is applied to a grid-mesh and plunge-frozen in liquid ethane or a mixture of liquid ethane and propane. While development of the technique began in the 1970s, recent advances in detector technology and software algorithms have allowed for the determination of biomolecular structures at near-atomic resolution.

Scanning transmission electron microscopy

A scanning transmission electron microscope (STEM) is a type of transmission electron microscope (TEM). Pronunciation is [stɛm] or [ɛsti:i:ɛm]. As with a conventional transmission electron microscope (CTEM), images are formed by electrons passing through a sufficiently thin specimen. However, unlike CTEM, in STEM the electron beam is focused to a fine spot (with the typical spot size 0.05 – 0.2 nm) which is then scanned over the sample in a raster illumination system constructed so that the sample is illuminated at each point with the beam parallel to the optical axis.

Transmission electron cryomicroscopy

Transmission electron cryomicroscopy (CryoTEM), commonly known as cryo-EM, is a form of cryogenic electron microscopy, more specifically a type of transmission electron microscopy (TEM) where the sample is studied at cryogenic temperatures (generally liquid-nitrogen temperatures). Cryo-EM is gaining popularity in structural biology. The utility of transmission electron cryomicroscopy stems from the fact that it allows the observation of specimens that have not been stained or fixed in any way, showing them in their native environment.

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SEM Basics: Introduction to Electron Microscopy

Introduces the basics of scanning electron microscopy, covering electron sources, lenses, vacuum system, and detectors.

Describing Data: Statistics and Hypothesis Testing

Covers descriptive statistics, hypothesis testing, and correlation analysis with various probability distributions and robust statistics.

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