Lecture

Electron Microscopy: Basics and Techniques

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In course

MICRO-428: Metrology

The course deals with the concept of measuring in different domains, particularly in the electrical, optical, and microscale domains. The course will end with a perspective on quantum measurements, which could trigger the ultimate revolution in metrology. ...

Description

This lecture covers the fundamental components of electron microscopes, including electron sources, lenses, and detectors. It explains the interactions of electrons with samples, the working principles of SEM, TEM, and FIB, and the factors influencing resolution. The advantages of each technique, sample requirements, and preparation methods are discussed. Imaging modes such as SE, BS, and EDX in SEM are explained, along with nanofabrication methods using SEM/FIB. The session also delves into the correlation of AFM with SEM and showcases applications like stiffness tomography and 3D imaging.

Instructors (3)

Claudio Bruschini

Claudio Bruschini holds an MSc in high energy physics from the University of Genova and a PhD in Applied Sciences from the Vrije Universiteit Brussel (VUB). He started his career with INFN (Italy, 1993), in the WA92 CERN collaboration (particle physics), and then moved to CERN as a Fellow in the European GP-MIMD2 project, attached to the NA48 collaboration (particle physics, parallel programming, 1994-1995). He then started his close collaboration with EPFL, first in the DeTeC (Demining Technology Center) project (sensors for landmine detection/humanitarian demining, 1996-1997). After DeTeC's end, he started the first of a series of fruitful collaborations with the Vrije Universiteit Brussel (VUB) on humanitarian demining related R&D (1998). This was followed by the EUDEM survey project (The European Union in Humanitarian Demining, 1998), the EUDEM2 three year EC sponsored support measure (www.eudem.info, 2001-2004), and the DELVE support action (www.delve.vub.ac.be, 2007). In parallel he started working within the EPFL's AQUA group (Advanced Quantum Architectures, Edoardo Charbon), on topics as diverse as ultrasonic sensors for in-air application, optical 3D and high speed 2D sensing, sensor networks, or tracking/motion capture systems, in particular for the preparation of research projects. This culminated in the European MEGAFRAME (www.megaframe.eu, FP6, 2006-2010, SPAD arrays and related in-pixel time stamping electronics in deep submicron CMOS technology) and SPADnet (www.spadnet.eu, FP7, 2010-2014, networked SPAD arrays for Positron Emission Tomography) projects, coordinated by EPFL-AQUA. As from 2009 he also worked with Dario Floreano on the management of the CURVACE Curved Artificial Compound Eyes FP7 project (www.curvace.org), coordinated by EPFL-LIS. He was also active with CHUV (Lausanne University Hospital) within EndoTOFPET-US (endoscopic PET) as well as on a CTI project devoted to the development of a new hand-held standalone tool for tracer-guided medical procedures. In 2014 he had also the pleasure of joining the EPFL ICLAB of Christian Enz during its ramp-up phase, collaborating on device related topics (SNF GigaRadMOST) and biomedical R&D (NanoTera WiseSkin). Claudio is now fully with EPFL’s Advanced Quantum Architecture (AQUA). He has also been active as independent scientific consultant, under the label CBR Scientific Consulting, on the preparation of (European) R&D project proposals and the execution of individual studies, and worked in 2006 for a local start-up as operations manager and R&D advisor.... but this is another story. An unauthorized early biography is available at http://lami.epfl.ch/team/claudiob/...

Official source

Related concepts (32)

Correlation

In statistics, correlation or dependence is any statistical relationship, whether causal or not, between two random variables or bivariate data. Although in the broadest sense, "correlation" may indicate any type of association, in statistics it usually refers to the degree to which a pair of variables are linearly related. Familiar examples of dependent phenomena include the correlation between the height of parents and their offspring, and the correlation between the price of a good and the quantity the consumers are willing to purchase, as it is depicted in the so-called demand curve.

Pearson correlation coefficient

In statistics, the Pearson correlation coefficient (PCC) is a correlation coefficient that measures linear correlation between two sets of data. It is the ratio between the covariance of two variables and the product of their standard deviations; thus, it is essentially a normalized measurement of the covariance, such that the result always has a value between −1 and 1. As with covariance itself, the measure can only reflect a linear correlation of variables, and ignores many other types of relationships or correlations.

Intraclass correlation

In statistics, the intraclass correlation, or the intraclass correlation coefficient (ICC), is a descriptive statistic that can be used when quantitative measurements are made on units that are organized into groups. It describes how strongly units in the same group resemble each other. While it is viewed as a type of correlation, unlike most other correlation measures, it operates on data structured as groups rather than data structured as paired observations.

Transmission electron cryomicroscopy

Transmission electron cryomicroscopy (CryoTEM), commonly known as cryo-EM, is a form of cryogenic electron microscopy, more specifically a type of transmission electron microscopy (TEM) where the sample is studied at cryogenic temperatures (generally liquid-nitrogen temperatures). Cryo-EM is gaining popularity in structural biology. The utility of transmission electron cryomicroscopy stems from the fact that it allows the observation of specimens that have not been stained or fixed in any way, showing them in their native environment.

Correlation coefficient

A correlation coefficient is a numerical measure of some type of correlation, meaning a statistical relationship between two variables. The variables may be two columns of a given data set of observations, often called a sample, or two components of a multivariate random variable with a known distribution. Several types of correlation coefficient exist, each with their own definition and own range of usability and characteristics. They all assume values in the range from −1 to +1, where ±1 indicates the strongest possible agreement and 0 the strongest possible disagreement.

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Electron Microscopy: TEM

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