Explores lithography in microfabrication technologies, covering thin film deposition, print resolution, process flow, and limitations imposed by diffraction.
Delves into nanoscale properties, emphasizing surface effects and quantum phenomena, exploring electronic, mechanical, magnetic, photonic, and chemical properties unique to the nanoscale.
Explores Scanning Probe Lithography for nanometer-scale patterning techniques and its applications in AFM exposure, DPN, and local field enhanced oxidation.
Explores self-sensing cantilevers in Scanning Probe Microscopy and the advantages of integrated sensor-actuator systems for high-speed data collection.
Explores stencil lithography, a high-resolution direct patterning technique, and its applications on flexible substrates, dynamic stenciling, and biopatterning.