Lecture

Glass Bonding Techniques

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In course

MICRO-431: Materials and technology of microfabrication

The student will learn procedures and applications of modern microfabrication technologies, as practiced in a clean room environment, in particular modern techniques that go beyond the classical steps of deposition, lithography and etching, with a focus on ...

Description

This lecture covers various techniques for bonding glass to silicon, including field-assisted thermal bonding, thermal fusion bonding, anodic bonding, and pressure-assisted low-temperature fusion bonding. It explains the principles, parameters, advantages, and disadvantages of each technique, as well as the importance of matching thermal expansion coefficients. The instructor also discusses the mechanisms, applications, and evaluation methods of these bonding processes, highlighting the role of surface treatments, such as silane adhesion promotors, in enhancing adhesion strength.

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Instructors (2)

Thomas Lehnert

Martinus Adela Maria Gijs

Martin A.M. Gijs received his degree in physics in 1981 from the Katholieke Universiteit Leuven, Belgium and his Ph.D. degree in physics at the same university in 1986. He joined the Philips Research Laboratories in Eindhoven, The Netherlands, in 1987. Subsequently, he has worked there on micro-and nano-fabrication processes of high critical temperature superconducting Josephson and tunnel junctions, the microfabrication of microstructures in magnetic multilayers showing the giant magnetoresistance effect, the design and realisation of miniaturised motors for hard disk applications and the design and realisation of planar transformers for miniaturised power applications. He joined EPFL in 1997. His present interests are in developing technologies for novel magnetic devices, new microfabrication technologies for microsystems fabrication in general and the development and use of microsystems technologies for microfluidic and biomedical applications in particular.

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Related concepts (32)

Aneutronic fusion

Aneutronic fusion is any form of fusion power in which very little of the energy released is carried by neutrons. While the lowest-threshold nuclear fusion reactions release up to 80% of their energy in the form of neutrons, aneutronic reactions release energy in the form of charged particles, typically protons or alpha particles. Successful aneutronic fusion would greatly reduce problems associated with neutron radiation such as damaging ionizing radiation, neutron activation, reactor maintenance, and requirements for biological shielding, remote handling and safety.

Inertial confinement fusion

Inertial confinement fusion (ICF) is a fusion energy process that initiates nuclear fusion reactions by compressing and heating targets filled with fuel. The targets are small pellets, typically containing deuterium (2H) and tritium (3H). Energy is deposited in the target's outer layer, which explodes outward. This produces a reaction force in the form of shock waves that travel through the target. The waves compress and heat it. Sufficiently powerful shock waves generate fusion.

Muon-catalyzed fusion

Muon-catalyzed fusion (abbreviated as μCF or MCF) is a process allowing nuclear fusion to take place at temperatures significantly lower than the temperatures required for thermonuclear fusion, even at room temperature or lower. It is one of the few known ways of catalyzing nuclear fusion reactions. Muons are unstable subatomic particles which are similar to electrons but 207 times more massive. If a muon replaces one of the electrons in a hydrogen molecule, the nuclei are consequently drawn 196 times closer than in a normal molecule, due to the reduced mass being 196 times the mass of an electron.

Nuclear fusion

Nuclear fusion is a reaction in which two or more atomic nuclei, usually deuterium and tritium (hydrogen variants), are combined to form one atomic nuclei and subatomic particles (neutrons or protons). The difference in mass between the reactants and products is manifested as either the release or absorption of energy. This difference in mass arises due to the difference in nuclear binding energy between the atomic nuclei before and after the reaction.

Fusion power

Fusion power is a proposed form of power generation that would generate electricity by using heat from nuclear fusion reactions. In a fusion process, two lighter atomic nuclei combine to form a heavier nucleus, while releasing energy. Devices designed to harness this energy are known as fusion reactors. Research into fusion reactors began in the 1940s, but as of 2023, no device has reached net power. Fusion processes require fuel and a confined environment with sufficient temperature, pressure, and confinement time to create a plasma in which fusion can occur.

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