Lecture

MEMS and NEMS Systems

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In course

EE-536: Physical models for micro and nanosystems

Students will learn simple theoretical models, the theoretical background of finite element modeling as well as its application to modeling charge, mass and heat transport in electronic, fluidic and e

Description

This lecture covers physical models for micro and nanosystems, focusing on MEMS and NEMS devices. It discusses the simplest MEMS/NEMS elements, examples of devices, and RF resonators for motion detection. The instructor explains the goals of MEMS/NEMS systems, such as force sensing and mass spectrometry. The lecture also delves into sensitive mass detection using nanotubes, electrostatic actuation, and tunability in nanotube-based systems. Additionally, it explores nanotube chirality, torsional oscillators with carbon nanotubes, and the types of mechanical responses in materials. Theoretical background on mechanics, Hooke's law at the nanoscale, and linear elastic responses in isotropic materials are also covered.

Instructor

Andras Kis

2015− Associate professor, EPFL, STI, Institute of Electrical Engineering (IEL) and Materials Science and Engineering Institute (IMX) 2008−2015 Tenure-track assistant professor at EPFL, School of Engineering (STI), Institute of Electrical Engineering (IEL) 2004−2007 Postdoctoral researcher at the University of California, Berkeley, Physics Department in the group of Prof. Zettl 2000−2003 PhD student at EPFL, Faculty of basic sciences, Institute of physics of complex matter, group of Prof. Forró 1994−1999 MS, Physics, University of Zagreb, Croatia 1994 Baccalaureate, MIOC (Mathematical and Informational Educational Center) high school

Official source

Ontological neighbourhood

Chemical engineering

Materials science: Deformation of materials

Related concepts (31)

Shear modulus

In materials science, shear modulus or modulus of rigidity, denoted by G, or sometimes S or μ, is a measure of the elastic shear stiffness of a material and is defined as the ratio of shear stress to the shear strain: where = shear stress is the force which acts is the area on which the force acts = shear strain. In engineering , elsewhere is the transverse displacement is the initial length of the area. The derived SI unit of shear modulus is the pascal (Pa), although it is usually expressed in gigapascals (GPa) or in thousand pounds per square inch (ksi).

Young's modulus

Young's modulus , the Young modulus, or the modulus of elasticity in tension or axial compression (i.e., negative tension), is a mechanical property that measures the tensile or compressive stiffness of a solid material when the force is applied lengthwise. It quantifies the relationship between tensile/compressive stress (force per unit area) and axial strain (proportional deformation) in the linear elastic region of a material and is determined using the formula: Young's moduli are typically so large that they are expressed not in pascals but in gigapascals (GPa).

Elastic modulus

An elastic modulus (also known as modulus of elasticity) is the unit of measurement of an object's or substance's resistance to being deformed elastically (i.e., non-permanently) when a stress is applied to it. The elastic modulus of an object is defined as the slope of its stress–strain curve in the elastic deformation region: A stiffer material will have a higher elastic modulus. An elastic modulus has the form: where stress is the force causing the deformation divided by the area to which the force is applied and strain is the ratio of the change in some parameter caused by the deformation to the original value of the parameter.

Bulk modulus

The bulk modulus ( or ) of a substance is a measure of the resistance of a substance to bulk compression. It is defined as the ratio of the infinitesimal pressure increase to the resulting relative decrease of the volume. Other moduli describe the material's response (strain) to other kinds of stress: the shear modulus describes the response to shear stress, and Young's modulus describes the response to normal (lengthwise stretching) stress. For a fluid, only the bulk modulus is meaningful.

Resonator

A resonator is a device or system that exhibits resonance or resonant behavior. That is, it naturally oscillates with greater amplitude at some frequencies, called resonant frequencies, than at other frequencies. The oscillations in a resonator can be either electromagnetic or mechanical (including acoustic). Resonators are used to either generate waves of specific frequencies or to select specific frequencies from a signal. Musical instruments use acoustic resonators that produce sound waves of specific tones.

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