Lecture

NEMS and MEMS: Micro- and Nanoelectromechanical Systems

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In course

EE-536: Physical models for micro and nanosystems

Students will learn simple theoretical models, the theoretical background of finite element modeling as well as its application to modeling charge, mass and heat transport in electronic, fluidic and e

Description

This lecture by the instructor covers the physical models for micro and nanosystems, focusing on micro- and nanoelectromechanical systems. It delves into the simplest MEMS/NEMS, practical applications like force sensing and mass spectrometry, RF resonators, fabrication sequences, motion detection techniques, and sensitive mass detection using carbon nanotubes. Theoretical background on mechanics, Hooke's law at the nanoscale, types of mechanical responses, linear elastic response, and elastic moduli of materials are also discussed.

Instructor

Andras Kis

2015− Associate professor, EPFL, STI, Institute of Electrical Engineering (IEL) and Materials Science and Engineering Institute (IMX) 2008−2015 Tenure-track assistant professor at EPFL, School of Engineering (STI), Institute of Electrical Engineering (IEL) 2004−2007 Postdoctoral researcher at the University of California, Berkeley, Physics Department in the group of Prof. Zettl 2000−2003 PhD student at EPFL, Faculty of basic sciences, Institute of physics of complex matter, group of Prof. Forró 1994−1999 MS, Physics, University of Zagreb, Croatia 1994 Baccalaureate, MIOC (Mathematical and Informational Educational Center) high school

Official source

Ontological neighbourhood

Chemical engineering

Materials science: Deformation of materials

Related concepts (32)

Elastic modulus

An elastic modulus (also known as modulus of elasticity) is the unit of measurement of an object's or substance's resistance to being deformed elastically (i.e., non-permanently) when a stress is applied to it. The elastic modulus of an object is defined as the slope of its stress–strain curve in the elastic deformation region: A stiffer material will have a higher elastic modulus. An elastic modulus has the form: where stress is the force causing the deformation divided by the area to which the force is applied and strain is the ratio of the change in some parameter caused by the deformation to the original value of the parameter.

Elasticity (physics)

In physics and materials science, elasticity is the ability of a body to resist a distorting influence and to return to its original size and shape when that influence or force is removed. Solid objects will deform when adequate loads are applied to them; if the material is elastic, the object will return to its initial shape and size after removal. This is in contrast to plasticity, in which the object fails to do so and instead remains in its deformed state. The physical reasons for elastic behavior can be quite different for different materials.

Stress–strain curve

In engineering and materials science, a stress–strain curve for a material gives the relationship between stress and strain. It is obtained by gradually applying load to a test coupon and measuring the deformation, from which the stress and strain can be determined (see tensile testing). These curves reveal many of the properties of a material, such as the Young's modulus, the yield strength and the ultimate tensile strength. Generally speaking, curves representing the relationship between stress and strain in any form of deformation can be regarded as stress–strain curves.

Mass spectrometry

Mass spectrometry (MS) is an analytical technique that is used to measure the mass-to-charge ratio of ions. The results are presented as a mass spectrum, a plot of intensity as a function of the mass-to-charge ratio. Mass spectrometry is used in many different fields and is applied to pure samples as well as complex mixtures. A mass spectrum is a type of plot of the ion signal as a function of the mass-to-charge ratio.

Elastic energy

Elastic energy is the mechanical potential energy stored in the configuration of a material or physical system as it is subjected to elastic deformation by work performed upon it. Elastic energy occurs when objects are impermanently compressed, stretched or generally deformed in any manner. Elasticity theory primarily develops formalisms for the mechanics of solid bodies and materials. (Note however, the work done by a stretched rubber band is not an example of elastic energy. It is an example of entropic elasticity.

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