Lecture

Introduction to Advanced MEMS

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In course

MICRO-534: Advanced MEMS & microsystems

In depth analysis of the operation principles and technology of advanced micro- and nanosystems. Familiarisation to their implementation into products and their applications. ...

Description

This lecture introduces the practical aspects of the Advanced MEMS and Microsystems course, covering the course structure, schedule, content, and evaluation criteria. It also explores the position of the course in the Master program, prerequisites, learning outcomes, course content, and support. The lecture delves into MEMS technology, trends, sensors, actuators, optical MEMS, RF-MEMS, NEMS, and more. Additionally, it discusses student presentations, industrial seminars, references books, MEMS glossary, and relevant journals and conferences in the field.

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Instructors (2)

Danick Briand

Expertise MEMS and MicrosystemsFlexible and Printed ElectronicsEnergy Harvesting and PowerMEMSSmart Sensing SystemsAdvanced Gas Sensing TechnologiesMicrofabrication and Printing technologiesMicrosystems Integration and Packaging Expertise MEMS and MicrosystemsFlexible and Printed ElectronicsEnergy Harvesting and PowerMEMSSmart Sensing SystemsAdvanced Gas Sensing TechnologiesMicrofabrication and Printing technologiesMicrosystems Integration and Packaging Mission Environmentally-friendly technology is a rapid

Niels Quack

Prof. Dr. Niels Quack received the M.Sc. degree from Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland, in 2005, and the Dr.Sc. degree from Eidgenössische Technische Hochschule Zürich (ETH), Zürich, Switzerland, in 2010. From 2011 to 2015, he was Postdoctoral Researcher and Visiting Scholar with the Integrated Photonics Laboratory, Berkeley Sensor and Actuator Center, University of California, Berkeley, CA, USA. From 2014 to 2015, he was Senior MEMS Engineer with Sercalo Microtechnology, Neuchâtel, Switzerland. He is currently an SNSF Assistant Professor with Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland. He has authored and co-authored more than 50 papers in leading technical journals and conferences. His research interests include photonic micro and nanosystems, with an emphasis on diamond photonics and silicon photonic MEMS. He is Steering Committee Member of the IEEE International Conference on Optical MEMS and Nanophotonics (OMN) and served as General Chair of the IEEE OMN 2018 and the Latsis Symposium 2019 on Diamond Photonics. He is a Senior Member of IEEE, Member of The Optical Society (OSA) and life member of SPIE.

Official source

Related concepts (23)

Etching (microfabrication)

Etching is used in microfabrication to chemically remove layers from the surface of a wafer during manufacturing. Etching is a critically important process module, and every wafer undergoes many etching steps before it is complete. For many etch steps, part of the wafer is protected from the etchant by a "masking" material which resists etching. In some cases, the masking material is a photoresist which has been patterned using photolithography. Other situations require a more durable mask, such as silicon nitride.

Impact of nanotechnology

The impact of nanotechnology extends from its medical, ethical, mental, legal and environmental applications, to fields such as engineering, biology, chemistry, computing, materials science, and communications. Major benefits of nanotechnology include improved manufacturing methods, water purification systems, energy systems, physical enhancement, nanomedicine, better food production methods, nutrition and large-scale infrastructure auto-fabrication.

Actuator

An actuator is a component of a machine that is responsible for moving and controlling a mechanism or system, for example by opening a valve. In simple terms, it is a "mover". An actuator requires a control device (controlled by control signal) and a source of energy. The control signal is relatively low energy and may be electric voltage or current, pneumatic, or hydraulic fluid pressure, or even human power. Its main energy source may be an electric current, hydraulic pressure, or pneumatic pressure.

Molecular nanotechnology

Molecular nanotechnology (MNT) is a technology based on the ability to build structures to complex, atomic specifications by means of mechanosynthesis. This is distinct from nanoscale materials. Based on Richard Feynman's vision of miniature factories using nanomachines to build complex products (including additional nanomachines), this advanced form of nanotechnology (or molecular manufacturing) would make use of positionally-controlled mechanosynthesis guided by molecular machine systems.

Valve actuator

A valve actuator is the mechanism for opening and closing a valve. Manually operated valves require someone in attendance to adjust them using a direct or geared mechanism attached to the valve stem. Power-operated actuators, using gas pressure, hydraulic pressure or electricity, allow a valve to be adjusted remotely, or allow rapid operation of large valves. Power-operated valve actuators may be the final elements of an automatic control loop which automatically regulates some flow, level or other process.

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