Lecture

Stencil Lithography: Nanometer Scale Patterning

Graph Chat

Chat with Graph Search

Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.

DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.

In course

MICRO-530: Nanotechnology

This course gives the basics for understanding nanotechnology from an engineer's perspective: physical background, materials aspects and scaling laws, fabrication and imaging of nanoscale devices. ...

Description

This lecture introduces stencil lithography as a one-step, resistless process for high-resolution direct patterning at the nanometer scale. It covers the advantages over conventional lithography, such as no contact, no photoresist, and no high-temperature processes. Examples include deposition of various metals and challenges like membrane stability and alignment.

Instructors (2)

Giovanni Boero

Expertise Nuclear magnetic resonance (NMR), Electron spin resonance (ESR), Ferromagnetic resonance (FMR), RF/MW discrete and integrated electronics, Magnetic sensors, Noise phenomena. Mission Methods based on the magnetic resonance of nuclear spins (nuclear magnetic resonance (NMR)), unpaired electrons spins (electron spin resonance (ESR)), and coupled electron spins electrons (ferromagnetic resonance (FMR)) are very powerful radiofrequency/microwave spectroscopy tools used in many research and industrial a

Jürgen Brugger

I am a Professor of Microengineering and co-affiliated to Materials Science. Before joining EPFL I was at the MESA Research Institute of Nanotechnology at the University of Twente in the Netherlands, at the IBM Zurich Research Laboratory, and at the Hitachi Central Research Laboratory, in Tokyo, Japan. I received a Master in Physical-Electronics and a PhD degree from Neuchâtel University, Switzerland. Research in my laboratory focuses on various aspects of MEMS and Nanotechnology. My group contributes to the field at the fundamental level as well as in technological development, as demonstrated by the start-ups that spun off from the lab. In our research, key competences are in micro/nanofabrication, additive micro-manufacturing, new materials for MEMS, increasingly for wearable and biomedical applications. Together with my students and colleagues we published over 200 peer-refereed papers and I had the pleasure to supervise over 25 PhD students. Former students and postdocs have been successful in receiving awards and starting their own scientific careers. I am honoured for the appointment in 2016 as Fellow of the IEEE “For contributions to micro and nano manufacturing technology”. In 2017 my lab was awarded an ERC AdvG in the field of advanced micro-manufacturing.

Official source

Related concepts (19)

Chemical vapor deposition

Chemical vapor deposition (CVD) is a vacuum deposition method used to produce high-quality, and high-performance, solid materials. The process is often used in the semiconductor industry to produce thin films. In typical CVD, the wafer (substrate) is exposed to one or more volatile precursors, which react and/or decompose on the substrate surface to produce the desired deposit. Frequently, volatile by-products are also produced, which are removed by gas flow through the reaction chamber.

Evaporation (deposition)

Evaporation is a common method of thin-film deposition. The source material is evaporated in a vacuum. The vacuum allows vapor particles to travel directly to the target object (substrate), where they condense back to a solid state. Evaporation is used in microfabrication, and to make macro-scale products such as metallized plastic film. Evaporation involves two basic processes: a hot source material evaporates and condenses on the substrate. It resembles the familiar process by which liquid water appears on the lid of a boiling pot.

Nano-

Nano (symbol n) is a unit prefix meaning one billionth. Used primarily with the metric system, this prefix denotes a factor of 10−9 or 0.000 000 001. It is frequently encountered in science and electronics for prefixing units of time and length. Examples Three gold atoms lined up are about one nanometer (nm) long. If a toy marble were scaled down to one nanometer wide, Earth would scale to about wide. One nanosecond (ns) is about the time required for light to travel 30 cm in air, or 20 cm in an optical fiber.

Design pattern

A design pattern is the re-usable form of a solution to a design problem. The idea was introduced by the architect Christopher Alexander and has been adapted for various other disciplines, particularly software engineering. An organized collection of design patterns that relate to a particular field is called a pattern language. This language gives a common terminology for discussing the situations designers are faced with. The elements of this language are entities called patterns.

Software design pattern

In software engineering, a software design pattern is a general, reusable solution to a commonly occurring problem within a given context in software design. It is not a finished design that can be transformed directly into source or machine code. Rather, it is a description or template for how to solve a problem that can be used in many different situations. Design patterns are formalized best practices that the programmer can use to solve common problems when designing an application or system.

Related lectures (13)

Nano-Fabrication Methods Overview

Explores stencil lithography, a high-resolution direct patterning technique, and its applications on flexible substrates, dynamic stenciling, and biopatterning.

Lithography: Scanning Probe Lithography MOOC: Micro and Nanofabrication (MEMS)

Delves into scanning probe lithography, exploring its principles and potential applications in nano-fabrication.

Micro and Nanofabrication for Optomechanics

Explores the importance of micro- and nanofabrication in optomechanics, covering key processes and challenges in device fabrication.

Physical Vapor Deposition: Evaporation Techniques MOOC: Micro and Nanofabrication (MEMS)

Explores Physical Vapor Deposition techniques, including shadowing effects and equipment specifications for evaporation processes in micro and nanofabrication.

Thin Films: Deposition and Patterning