Explores self-organized growth at surfaces and covers instrumentation, destructive exposure, manipulation with SIM, nanostructures, and thin film growth.
Explores lithography in microfabrication technologies, covering thin film deposition, print resolution, process flow, and limitations imposed by diffraction.
Explores Scanning Probe Lithography for nanometer-scale patterning techniques and its applications in AFM exposure, DPN, and local field enhanced oxidation.