Explores the evolution of micro and nanoengineering, focusing on the use of silicon as a mechanical material and the application of AFM and T-SPL in nanoengineering.
Explores Scanning Probe Lithography for nanometer-scale patterning techniques and its applications in AFM exposure, DPN, and local field enhanced oxidation.
Explores the fundamentals and applications of scanning probe microscopy, including STM setup, surface reconstruction, quantum tunneling, and scanning force microscopy.