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Concept

Etching (microfabrication)

Related lectures (32)

Microfabrication Technologies

Explores microfabrication technologies, lithography, MEMS, cleanroom processes, resolution enhancement, phase shift masks, and chip manufacturing complexity.

Photonic Crystals: Fabrication Techniques

Delves into the fabrication techniques of photonic crystals, inspired by natural structures like butterfly wings and opal stones.

Cleanroom Basics: Cleanroom Strategy MOOC: Micro and Nanofabrication (MEMS)

Covers methods for achieving high air purity in cleanroom environments for microfabrication processes.

Dry Etching: Techniques and Equipment MOOC: Micro and Nanofabrication (MEMS)

Explores various dry etching techniques for silicon and the equipment used in the process, including RF plasma sources and HF vapor phase etchers.

Lithography: Microfabrication Technologies

Explores lithography in microfabrication technologies, covering thin film deposition, print resolution, process flow, and limitations imposed by diffraction.

Fabrication extended: Etching Log in to Mediaspace to watch this video

Covers the process of etching using wet and dry techniques, explaining definitions, steps, examples, challenges, and solutions.

Glass Microfabrication by Wet Etching Log in to Mediaspace to watch this video

Explores glass microfabrication using wet etching with hydrofluoric acid, covering etching mechanisms, additives impact, and surface effects.

Micro/Nanomechanical Devices: Fabrication Techniques Log in to Mediaspace to watch this video

Explores the fabrication of micro/nanomechanical devices, covering release, selectivity, stiction, deposition, etching, lithography, and growth techniques.

Introduction to Advanced MEMS Log in to Mediaspace to watch this video

Introduces the practical aspects of the Advanced MEMS course and explores MEMS technology, trends, sensors, actuators, and more.

Lab in a Tube: Design and Fabrication of Microfabricated Transducers Log in to Mediaspace to watch this video

Covers the design and fabrication of microfabricated transducers for measuring liquid flow and temperature in small-diameter tubes, emphasizing hands-on prototyping and team collaboration.

Solid Ground Curing: Principles and Examples Log in to Mediaspace to watch this video

Explores the Solid Ground Curing process, its consolidation mechanism, advantages, and applications in additive manufacturing.

Philippe Renault: A Journey in Micro-Technology Log in to Mediaspace to watch this video

Honors Philippe Renault's journey in micro-technology, highlighting his pivotal role in establishing the CMI at EPFL.