Mihai Adrian IonescuAdrian M. Ionescu is Full Professor at the Swiss Federal Institute of Technology, Lausanne, Switzerland. He received the B.S./M.S. and Ph.D. degrees from the Polytechnic Institute of Bucharest, Romania and the National Polytechnic Institute of Grenoble, France, in 1989 and 1997, respectively. He has held staff and/or visiting positions at LETI-CEA, Grenoble, France and INP Grenoble, France and Stanford University, USA, in 1998 and 1999. Dr. Ionescu has published more than 600 articles in international journals and conferences. He received many Best Paper Awards in international conferences, the Annual Award of the Technical Section of the Romanian Academy of Sciences in 1994 and the Blondel Medal in 2009 for contributions to the progress in engineering sciences in the domain of electronics. He is the 2013 recipient of the IBM Faculty Award in Engineering. He served the IEDM and VLSI conference technical committees and was the Technical Program Committee (Co)Chair of ESSDERC in 2006 and 2013. He is a member of the SATW. He is director of the Laboratory of Micro/Nanoelectronic Devices (NANOLAB).
Hans Peter HerzigDr. Hans Peter Herzig is Professor at the Ecole Polytechnique Fédérale de Lausanne (EPFL) and Past President of the European Optical Society (EOS). His current research interests include refractive and diffractive micro-optics, nano-scale optics and optical MEMS.
Hans Peter Herzig received his diploma in physics from the Swiss Federal Institute of Technology in Zürich, Switzerland, in 1978. From 1978 to 1982 he was a scientist with the Optics Development Department of Kern in Aarau, Switzerland, working in lens design and optical testing. In 1983, he became a graduate research assistant with the Applied Optics Group at the Institute of Microtechnology of the University of Neuchâtel, Switzerland, working in the field of holographic optical elements. In 1987, he received his PhD degree in optics. From 1989 to 2001 he was head of the micro-optics research group in Neuchâtel. From 2002 to 2008 he was a full professor and head of the Applied Optics Laboratory at the University of Neuchâtel. Professor Herzig joined the faculty at EPFL in January 2009.
He is member of OSA, IEEE Photonics Society and Fellow of EOS. 2009-2010 he was President of the European Optical Society (EOS), 2001-2009 Vice-President of the Swiss Society of Optics and Microscopy and 2012-2014 Vice-President of ICO. Dr. Herzig is in the editorial board of different scientific journals (JM3, Optical Review, JEOS). He served as Conference Chairman for international conferences of EOS, IEE, IEEE/LEOS, OSA and SPIE; and as Guest Editor of three special issues of IEEE, OSA journals. He is editor of a well-known book on micro-optics (published in English and Chinese), author of 14 book chapters, over 150 peer reviewed articles and 300 conference proceedings.
Yves BellouardDr. Yves Bellouard is Associate Professor in Microengineering at Ecole Polytechnique Fédérale de Lausanne (EPFL) in Switzerland, where he heads the Galatea lab and the Richemont Chair in micromanufacturing. He received a BS in Theoretical Physics and a MS in Applied Physics from Université Pierre et Marie Curie in Paris, France in 1994-1995 and a PhD in Microengineering from Ecole Polytechnique Fédérale de Lausanne (EPFL) in Lausanne, Switzerland in 2000. For his PhD work, he received the Omega Scientific prize (2001) for outstanding contribution in the field of microengineering for his work on Shape Memory Alloys. Before joining EPFL in 2015, he was Associate Professor at Eindhoven University of Technologies (TU/e) in the Netherlands and prior to that, Research Scientist at Rensselaer Polytechnic Institute (RPI) in Troy, New York for about four years where he started working on femtosecond laser processing of glass materials. From 2010 until 2013, Yves Bellouard initiated and coordinated the Femtoprint project, a European research initiative aiming at investigating a table-top printer for microsystems ('3D printing of microsystems'). In 2013, he received a prestigious ERC Starting Grant (Consolidator-2012) from the European Research Council and a JSPS Fellowship from the Japan Society for the Promotion of Science. His current research interests are on new paradigms for system integration at the microscale and in particular laser-based methods to tailor material properties for achieving higher level of integration in microsystems, like for instance integrating optics, mechanics and fluidics in a single monolith. These approaches open new opportunities for direct-write methods of microsystems (3D printing). Personal website
Christophe BallifChristophe Ballif is director of the Phototovoltaics and Thin Film Electronics Laboratoryb) (PV-Lab at the institute of microengineering (IMT) in Neuchâtel (part of the EPFL since 2009). The lab focus is on the science and technology of high efficiency heterojunction crystalline cells,so-called passivating contacts for solar cells, multi-junction solar cells include novel generation Perovskite on innovative optical high speed detector and on various macroelectronics application. It also deals with energy management with a focus on integration of solar electricity into the energy system. The PV-Lab has strongly contributed to technology transfer and industrialization of novel devices and full technology with numerous companies. Christophe Ballif graduated as a physicist from the EPFL in 1994, where he also obtained in 1998 his Phd degree working on novel PV materials. He accomplished his postdoctoral research at NREL (Golden, US) on compound semiconductor solar cells (CIGS and CdTe). He worked then at the Fraunhofer ISE (Ge) on crystalline silicon photovoltaics (monocrystalline and multi-crystalline) until 2003 and then at the EMPA in Thun (CH) before becoming full professor at the University of Neuchâtel IMT in 2004, taking over the chair of Prof. A. Shah. Since 2013, C.Ballif is also the director of the new CSEM PV-Center, also located in Neuchâtel. The CSEM PV-Center is focussing more on industrialisation and technology transfer in the field of solar energy, including solar electricity management and storage. At the core of the CSEM PV-center activities lies several "pilot lines" for various kinds of solar cells manufacturing, with a focus coating technologies, wet chemistry processes for crystalline silicon, metalisation techniques for solar cells, and a platform for developing "ideal packaging solutions and polymers" for PV modules. In addition, joined facitilites between CSEM and EPFL of over 800 m2 are available for modules manufacturing, measuring and accelerated aging. CSEM PV-center has also full team dedicated to storage and energy systems and operates a joined center with BFH in Biel for research on electrochemical storage. He (co-) authored over 500 journal and technical papers, as well as several patents. He is an elected member of the SATW, member of the scientific council of the Swiss AEE, and member of the board of the EPFL Energy center. In 2016, he recieved the Becquerel prize for his contributions to the field of high efficiency photovoltaics.
Yves LeterrierYves Leterrier joined EPFL in 1993 and is a faculty member of the Materials Institute. He is a senior scientist and lecturer in the Laboratory for Processing of Advanced Composites (LPAC, previously Laboratory of Composite and Polymer Technology, LTC). Activities
2000-2005: Foundation and Chair of the Korea-Switzerland joint symposia on materials and micro-technologies2004-2008: Board member of FLEXIDIS (the European flexible display consortium) 2004-2009: Group leader on lightweight materials for Solar ImpulseSince 2008: Board member of the French Adhesion SocietySince 2000: President of the EPFL Materials Science Library commissionSince 2012: Editorial board member, Applied Surface ScienceSince 2014: Associate Editor, Frontiers in MaterialsSince 2021: Coordinator of the EPFL Minor on 'Engineering for Sustainability'
Background
1987: MS in materials science and solid state physics (INPL, France) 1991: PhD in materials science (Ecole des Mines, INPL, France) 1992: Research Associate, National Institute of Standards and Technology (NIST, USA)
Jürgen BruggerI am a Professor of Microengineering and co-affiliated to Materials Science. Before joining EPFL I was at the MESA Research Institute of Nanotechnology at the University of Twente in the Netherlands, at the IBM Zurich Research Laboratory, and at the Hitachi Central Research Laboratory, in Tokyo, Japan. I received a Master in Physical-Electronics and a PhD degree from Neuchâtel University, Switzerland. Research in my laboratory focuses on various aspects of MEMS and Nanotechnology. My group contributes to the field at the fundamental level as well as in technological development, as demonstrated by the start-ups that spun off from the lab. In our research, key competences are in micro/nanofabrication, additive micro-manufacturing, new materials for MEMS, increasingly for wearable and biomedical applications. Together with my students and colleagues we published over 200 peer-refereed papers and I had the pleasure to supervise over 25 PhD students. Former students and postdocs have been successful in receiving awards and starting their own scientific careers. I am honoured for the appointment in 2016 as Fellow of the IEEE “For contributions to micro and nano manufacturing technology”. In 2017 my lab was awarded an ERC AdvG in the field of advanced micro-manufacturing.
Jonathan GravesProf. Jonathan P. Graves is a Senior Scientist at EPFL and Honorary Visiting Professor at the University of York, UK. He achieved first class joint honours in Electronic Engineering and Mathematics from the University of Nottingham, UK in 1996. He completed his Ph.D. in Theoretical Mechanics from the University of Nottingham, UK, three years later in 1999. During his Ph.D. he was based in the Culham theory group of the United Kingdom Atomic Energy Authority, developing kinetic descriptions of the internal kink instability, and participating in deuterium-tritium experimental analysis in the Joint European Torus. After a short time in industry, and a postdoc at Nottingham University, he took a position at the Swiss Plasma Center at EPFL, becoming a Senior Scientist in 2014, and became an Honorary Visiting Professor at the University of York, UK, in 2020. In 2015 he became a member of the EUROfusion Scientific and Technical Advisory Committee (STAC) and a member of the EUROfusion DEMO Technical Advisory Group. He is on the editorial board for the journal Plasma Physics and Controlled Fusion, and in 2020 became Scientific Secretary of the Varenna-Lausanne International Workshop in Theory of Fusion Plasmas.
Niels QuackProf. Dr. Niels Quack received the M.Sc. degree from Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland, in 2005, and the Dr.Sc. degree from Eidgenössische Technische Hochschule Zürich (ETH), Zürich, Switzerland, in 2010. From 2011 to 2015, he was Postdoctoral Researcher and Visiting Scholar with the Integrated Photonics Laboratory, Berkeley Sensor and Actuator Center, University of California, Berkeley, CA, USA. From 2014 to 2015, he was Senior MEMS Engineer with Sercalo Microtechnology, Neuchâtel, Switzerland. He is currently an SNSF Assistant Professor with Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland. He has authored and co-authored more than 50 papers in leading technical journals and conferences. His research interests include photonic micro and nanosystems, with an emphasis on diamond photonics and silicon photonic MEMS. He is Steering Committee Member of the IEEE International Conference on Optical MEMS and Nanophotonics (OMN) and served as General Chair of the IEEE OMN 2018 and the Latsis Symposium 2019 on Diamond Photonics. He is a Senior Member of IEEE, Member of The Optical Society (OSA) and life member of SPIE.
Philippe FlückigerSince 1999 Philippe Flückiger is the Director of Operations at the EPFL Center of MicroNanoTechnology, a world-class state-of-the-art cleanroom dedicated to research and development in the field of Micro and NanoFabrication. He received his diploma in physics from the University of Neuchâtel, Switzerland in 1987 and his PhD from the same University in 1993. His thesis work was dedicated to the deposition, patterning and characterization of high temperature superconductor epitaxial thin films. From 1993 to 1994 he was a post doc at Stanford University to develop submicron lithography with the atomic force microscope in the group of Calvin Quate, inventor of the AFM. From 1995 to 1997 he was successively process engineer, project manager and process engineering manager at Micronas SA in Bevaix, Switzerland, a microelectronics company producing baseband processors and voltage regulators for wireless applications, mostly ASICs for Nokia Mobile Phones. In 1997 he spent 4 months in the production line of EM Microelectronic Marin SA, Switzerland, a semiconductor manufacturer specialized in the design and production of ultra low power, low voltage integrated circuits for battery-operated and field-powered applications. He joined then the Swiss Federal Institute of Technology in Lausanne (EPFL) to start the new activity in diffusion, oxidation and CVD at the Center of MicroNanoTechnology. He was appointed Director of Operations of the Center in 1999.
Yves PerriardYves Perriard was born in Lausanne in 1965. He received the M. Sc. in Microengineering from the Swiss Federal Institute of Technology - Lausanne (EPFL) in 1989 and the Ph D. degree in 1992. Co-founder of Micro-Beam SA, he was CEO of this company involved in high precision electric drive. Senior lecturer from 1998 and professor since 2003, he is currently director of Laboratory of Integrated Actuators. His research interests are in the field of new actuator design and associated electronic devices. In 2009, he is appointed Vice-Director of the Microengineering Institute in Neuchâtel until 2011. In 2013 the Federal Council has named him the the CTI commission in Bern. In 2014 he is appointed guest professor at Zhejiang University in China. In 2017, the lab is granted by the Werner Siemens Foundation of an amount of 12 millions CHF in order to set up a new Center for Artificial Muscules. Since 2018, he is Expert with Innosuisse, the new Swiss Innovation Agency. http://scholar.google.com/citations?hl=fr&user=V2onuO8AAAAJ https://actu.epfl.ch/news/a-12-million-franc-donation-to-create-a-center-for/ Arnaud BertschTeaching & PhD PhD Students Tao Zhang, Pol Torres Vila, Nicolas Bruno Minazzo Past EPFL PhD Students as codirector Joan Teixidor, Clémentine Sophie Sarah Lipp, Nicolas Grégoire Maïno, Jiande Zhou, Jongeon Park Courses Advanced microfabrication practicals MICRO-373 This TP allows for in-depth training on advanced micro and nanofabrication methods in a clean-room environment for selected applications, gain deeper knowledge in MEMS/NEMS processes, work in a small group together with PhD stude
Cyrille HibertCyrille HIBERT received his diploma in Physics in 1994 and his PhD in 1998 from University of Orleans (FR). He then held a post doctoral position in GREMI laboratory at the University of Orleans in collaboration with Alcatel Vacuum Technology and ST Microelectronics, working in deep anisotropic etching of silicon with an Inductively Coupled Plasma reactor. In May 2000 he joined the EPFL-Center of Micro-Nano-technology where he was in charge of the plasma etching activities. He left EPFL in October 2003 for a sabbatical year to join the CFF group at NMRC (Ireland) now called Tyndall Institute. He worked on developing plasma processing. In October 2004, he came back to EPFL-CMI to be in charge of etching and nanotechnology activities (FIB and future ebeam litho).
Benjamin DwirAcademic title: Dr.
Birth date: 24.10.1959
Nationality: Swiss
At EPFL since: 1988
