This TP allows for in-depth training on advanced micro and nanofabrication methods in a clean-room environment for selected applications, gain deeper knowledge in MEMS/NEMS processes, work in a small group together with PhD students/postdocs during 14 week ...
In depth analysis of the operation principles and technology of advanced micro- and nanosystems. Familiarisation to their implementation into products and their applications. ...
This course introduces advanced fabrication methods enabling the manufacturing of novel micro- and nanosystems (NEMS/MEMS). Both top-down techniques (lithography, stenciling, scanning probes, additive techniques) and bottom-up approaches (self-assembly) ar ...
Students will learn simple theoretical models, the theoretical background of finite element modeling as well as its application to modeling charge, mass and heat transport in electronic, fluidic and e