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Concept

Photoresist

Related publications (27)

Laser-Induced Forward Transfer of Functional Microdevices

Zhiwei Yang

Laser-induced forward transfer (LIFT) technique is an emerging micro additive manufacturing (AM) technique that has been widely used to print a variety of materials. Distinguished from other nozzle-based AM techniques, LIFT operates without the existence o ...

EPFL2023

Precise Capillary‐Assisted Nanoparticle Assembly in Reusable Templates

Olivier Martin, Jürgen Brugger, Giovanni Boero, Hsiang-Chu Wang, Ana Conde Rubio, Henry Shao-Chi Yu

Capillary-assisted particle assembly (CAPA) in predefined topographical templates is a scalable method for the precise positioning of nanoscale objects on various surfaces. High-resolution CAPA templates are typically fabricated by expensive electron-beam ...

2022

Fabrication of plasmonic structures with well-controlled nanometric features: a comparison between lift-off and ion beam etching

Olivier Martin, Christian Santschi, Banafsheh Abasahl

After providing a detailed overview of nanofabrication techniques for plasmonics, we discuss in detail two different approaches for the fabrication of metallic nanostructures based on e-beam lithography. The first approach relies on a negative e-beam resis ...

IOP PUBLISHING LTD2021

FABRICATION AND ANALYSIS OF THIN FILM LITHUM NIOBATE RESONATORS FOR 5GHz FREQUENCY AND LARGE k(t)(2) APPLICATIONS

Luis Guillermo Villanueva Torrijo, Soumya Yandrapalli, Seniz Esra Küçük

This work presents the fabrication and analysis of suspended thin film Lithium Niobate resonators. The yield of the new fabrication process presented below is >90% showing devices with high k(t)(2) of 28% resonators at 5GHz, making them suitable for high f ...

IEEE2021

Three-dimensional fabrication of sub-micron optical waveguides in PDMS and other polymer materials

Giulia Panusa

Optical waveguides are one of the most important photonic components. They are indispensable tools in many of todayâ s technologies because of their capacity of guiding light. In particular, compact, low loss, flexible polymer optical waveguides are cruci ...

EPFL2021

Integration of Ultra-Low Volume Pneumatic Microfluidics with a Three-Dimensional Electrode Network for On-Chip Biochemical Sensing

Carlotta Guiducci, Saurabh Tomar

This paper reports a novel miniaturized pseudo reference electrode (RE) design for biasing Ion Sensitive Field Effect Transistors (ISFETs). It eliminates the need for post-CMOS processing and can scale up in numbers with the CMOS scaling. The presented des ...

2021

Vibration monitoring based on optical sensing of mechanical nonlinearities in glass suspended waveguides

Yves Bellouard, Tao Yang, Pieter Vlugter, Enrico Casamenti

Vibration monitoring plays a key role in numerous applications, including machinerypredictive maintenance, shock detection, space applications, packaging-integrity monitoring andmining. Here, we investigate mechanical nonlinearities inherently present in s ...

2021

Grayscale e-beam lithography: Effects of a delayed development for well-controlled 3D patterning

Henning Paul-Julius Stahlberg

Grayscale electron beam lithography (g-EBL) is a fabrication technique that allows for tunable control of resist topography. In most cases, the height of the structures is in the submicron regime. Here, we present an extensive experimental characterization ...

2020

Increased electromechanical sensitivity of polysiloxane elastomers by chemical modification with thioacetic groups

Yee Song Ko

Chemically cross-linked polydimethylsiloxane (PDMS) elastomers have gained importance as a dielectric in elastic capacitor actuators, which elongate when electrically charged. Common PDMS elastomers have a dielectric permittivity of only about 3 and thus e ...

2020

Deep-UV-Enhanced Approach for Low-Temperature Solution Processing of IZO Transistors with High-k AlOx/YAlOx Dielectric

Danick Briand, Jaemin Kim, Alessio Mancinelli

Solution processing is an attractive alternative to standard vacuum fabrication techniques for the large-area manufacturing of metal oxide (MOx)-based electron devices. Here, we report on thin-film transistors (TFTs) based on a solution-processed indium zi ...

AMER CHEMICAL SOC2020

Transient Electronics for Smart Biodegradable Medical Implants

Matthieu Jean Michel Rüegg

Bioresorbable implantable medical devices show great potential for applications requiring medical care over well-defined periods of time. Such implants naturally degrade and resorb in the body, which eliminates adverse long-term effects or the need for a s ...

EPFL2020

Photoinitiator-free multi-photon fabrication of compact optical waveguides in polydimethylsiloxane

Demetri Psaltis, Christophe Moser, Ye Pu, Giulia Panusa, Jieping Wang

Compact, low loss flexible optical waveguides are crucial in optofluidic and microfluidic devices for a dense integration of optical functionalities. We demonstrate the fabrication of compact optical waveguides in polydimethylsiloxane through multiphoton l ...

2019

Health monitoring device

Christian Enz, Assim Boukhayma, Antonino Caizzone

The invention relates to a photoplethysmography (PPG) sensing device comprising - a pulsed light source, - at least one pixel to create photo-generated electrons, synchronized with said pulsed light source. It is mainly characterized in that each pixel com ...

2019

Single crystalline diamond part production method for stand alone single crystalline mechanical and optical component production

Niels Quack, Pascal Gallo, Teodoro Graziosi, Marcell Kristof Kiss, Adrien Marc Toros

The present invention relates to a free-standing single crystalline diamond part and a single crystalline diamond part production method. The method includes the steps of: - providing a single crystalline diamond substrate or layer; - providing a first adh ...

2019

Single crystalline diamond diffractive optical elements and method of fabricating the same

Niels Quack, Teodoro Graziosi, Marcell Kristof Kiss

The present invention concerns a single crystalline diamond optical element production method. The method includes the steps of: ‐ providing a single crystalline diamond substrate or layer; ‐ applying a mask layer to the single crystalline diamond substrat ...

2019

Integration of sharp silicon nitride tips into high-speed SU8 cantilevers in a batch fabrication process

Georg Fantner, Santiago Harald Andany, Oliver Peric, Nahid Hosseini, Matthias Neuenschwander, Jonathan David Adams

Employing polymer cantilevers has shown to outperform using their silicon or silicon nitride analogues concerning the imaging speed of atomic force microscopy (AFM) in tapping mode (intermittent contact mode with amplitude modulation) by up to one order of ...

Beilstein Institut2019

Nanoscale Lithography and Thermometry with Thermal Scanning Probes

Samuel Tobias Howell

Thermal scanning probe lithography (t-SPL) is an advanced lithography technique in which a heated atomic force microscope tip locally modifies a sample material. Due to the nanometer-sized tip apex diameter, t-SPL enables patterning of sub-10 nm structures ...

EPFL2018

Top-Down Technique for Scaling toNnano in Silicon MEMS

Yusuf Leblebici, Zuhal Tasdemir

Nanoscale building blocks impart added functionalities to microelectromechanical systems (MEMS). The integration of silicon nanowires with MEMS-based sensors leading to miniaturization with improved sensitivity and higher noise immunity is one example high ...

American Vacuum Society2017

Limitations of Proximity Lithography Printing : Simulations, Experiments, and Applications

Krishnaparvathy Puthankovilakam

Photolithography is one of the earliest technologies used to transfer patterns to a substrate. It is also known as optical lithography since it uses light to transfer the pattern. The main exposure techniques exist in the industry are projection printing, ...

EPFL2017

Microfluidic and Electrokinetic Manipulation of Single Cells

Samuel Kilchenmann

Traditional cell assays report on the average results of a cell population. However, a wide range of new tools are being developed for a fundamental understanding of single cell's functionality. Nonetheless, the current tools are either limited in their th ...

EPFL2017