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Publication

Thermo-mechanical Noise Measurement of Sealed Nanobeams on a Silicon Photonics-MEMS Platform

Niels Quack, Alain Yuji Takabayashi
2021
Conference Papers

Résumé

The thermal motion of a vacuum packaged, suspended nano-beam and nanophotonic waveguide on a silicon photonics-MEMS platform is measured. The resonance frequency and Q-factor of the observed mechanical modes are determined. We also experimentally estimate the displacement sensitivity to be 1.779 +/- 0.022 fm/root Hz.

Source officielle

Thermo-mechanical Noise Measurement of Sealed Nanobeams on a Silicon Photonics-MEMS Platform

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