Design of a miniature laser scanning head for high-bandwidth, low-amplitude beam steering

In laser micro-manufacturing, one of the challenges is to achieve fast scanning speed for fast fabrication of complex 3D microstructures. For microstructures with nanoscale features, it is often desirable to steer laser beams from a few microns to a few tens of nanometers away from their initial main trajectory. Here, we report on the design, fabrication and characterization of an optomechanical miniature laser scanning-head based on a movable focusing lens to cope with this challenge.