Concurrent polarization retrieval in multiheterodyne scanning near-field optical microscopy: validation on silicon formbirefringent grating

We demonstrate a concurrent polarization-retrieval algorithm based on a multi-heterodyne scanning near-field optical microscopy (MHSNOM) measurement system. This method relies on calibration of the polarization properties of the MH-SNOM using an isotropic region of the sample in the vicinity of the nanostructures of interest. We experimentally show the effectiveness of the method on a silicon form-birefringent grating (FBG) with significant polarization diversity. Three spatial dimensional near-field measurements are in agreement with theoretical predictions obtained with rigorous coupled-wave analysis (RCWA). Pseudo-far-field measurements are performed to obtain the effective refractive index of the FBG, emphasizing the validity of the proposed method. This reconstruction algorithm makes the MH-SNOM a powerful tool to analyze concurrently the polarization-dependent near-field optical response of nanostructures with sub wavelength resolution as long as a calibration area is available in close proximity.