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Silicon photonic microelectromechanical systems add-drop ring resonator in a foundry process

Publications associées (30)

High energy-density electrostatic actuators for soft robotics

This thesis reports high energy-density electrostatic actuators for use in soft robotics. This thesis has two main parts: a) a detailed study of electro-adhesion using microfabricated electrodes, and b) a flexi-ble fiber-shaped linear motor. Electro-adhesi ...

EPFL2024

Electric-field-induced second-order nonlinear processes in stoichiometric silicon nitride

Boris Zabelich

Nonlinear optical frequency conversion is one of the driving research areas in photonics. Its quasi instantaneous response and the promise of low power consumption in integrated structures could cover the demand for fast signal processing with minimal ener ...

EPFL2024

An Ultralow-Power Triaxial MEMS Accelerometer With High-Voltage Biasing and Electrostatic Mismatch Compensation

Yimai Peng, Li Xu, Kyojin Choo

This article presents a triaxial micro electromechani-cal system (MEMS) capacitive accelerometer using a high-voltage biasing technique to achieve high resolution with ultralow power. The accelerometer system generates a differential pair of high voltages ...

Ieee-Inst Electrical Electronics Engineers Inc2024

Integrated silicon photonic MEMS

Niels Quack, Hamed Sattari, Alain Yuji Takabayashi

Silicon photonics has emerged as a mature technology that is expected to play a key role in critical emerging applications, including very high data rate optical communications, distance sensing for autonomous vehicles, photonic-accelerated computing, and ...

SPRINGERNATURE2023

Linear and nonlinear applications of miniaturized silicon nitride microresonators

Arslan Sajid Raja

Photonic integrated circuits (PICs) are the subject of massive interest due to the range of applications they can provide at a huge scale while building on well-established CMOS technologies. One of the critical parameters defining a technology's maturity ...

EPFL2023

Sub-kHz-Linewidth External-Cavity Laser (ECL) With Si3N4 Resonator Used as a Tunable Pump for a Kerr Frequency Comb

Tobias Kippenberg, Junqiu Liu

Combining optical gain in direct-bandgap III-V materials with tunable optical feedback offered by advanced photonic integrated circuits is key to chip-scale external-cavity lasers (ECL), offering wideband tunability along with low optical linewidths. Exter ...

IEEE Institute of Electrical and Electronics Engineers2023

High density lithium niobate photonic integrated circuits

Rui Ning Wang, Tobias Kippenberg, Mikhail Churaev, Anat Siddharth, Zelin Tan, Nikolai Kuznetsov, Zihan Li, Junyin Zhang

Photonic integrated circuits have the potential to pervade into multiple applications traditionally limited to bulk optics. Of particular interest for new applications are ferroelectrics such as Lithium Niobate, which exhibit a large Pockels effect, but ar ...

Nature Portfolio2023

Nonlinear Integrated Photonics for Ranging Applications

Anton Lukashchuk

This thesis explores the application of recent advances in integrated photonics to the field of light detection and ranging (LiDAR). The progress in photonic integration allows for unprecedented levels of light manipulation on micrometer scales through the ...

EPFL2023

A heterogeneously integrated lithium niobate-on-silicon nitride photonic platform

Rui Ning Wang, Tobias Kippenberg, Junqiu Liu, Miles Henry Anderson, Mikhail Churaev, Anat Siddharth, Viacheslav Snigirev

The availability of thin-film lithiumniobate on insulator (LNOI) and advances in processing have led to the emergence of fully integrated LiNbO3 electro-optic devices. Yet to date, LiNbO3 photonic integrated circuits have mostly been fabricated using non-s ...

Nature Portfolio2023

Domain Imaging and Switching Dynamics in BaTiO3-Based Photonic Integrated Devices

Jacqueline Geler Kremer

Keeping up with our constantly connected lifestyle of instant messages and video streaming has its repercussions. Data centers have been gobbling up resources becoming a significant share of the energy used worldwide. To keep up with demand and curb the en ...

EPFL2023