Publication

Solid-gap resonators based on PVDF-TrFE

Mihai Adrian Ionescu
2016
Conference Papers

Résumé

High frequency wine-glass mode bulk MEMS resonators actuated by means of capacitive transduction have been fabricated by using solid-gaps based on polyvinylidenefluoride-trifluoroethylene (PVDF-TrFE). The fabrication process flow of patterned PVDF-TrFE gaps applied in RF MEMS is presented for the first time. Measurements of the polarization of the material and the frequency and voltage dependence of the capacitance in the actuation gaps of the resonators are provided.

Source officielle

https://infoscience.epfl.ch/entities/publication/dc578673-aa8a-48a5-bf72-f7b27898e6a0

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Mihai Adrian Ionescu
2016
Conference Papers

Résumé

Source officielle

https://infoscience.epfl.ch/entities/publication/dc578673-aa8a-48a5-bf72-f7b27898e6a0

À propos de ce résultat

Concepts associés (21)

Resonator

A resonator is a device or system that exhibits resonance or resonant behavior. That is, it naturally oscillates with greater amplitude at some frequencies, called resonant frequencies, than at other frequencies. The oscillations in a resonator can be either electromagnetic or mechanical (including acoustic). Resonators are used to either generate waves of specific frequencies or to select specific frequencies from a signal. Musical instruments use acoustic resonators that produce sound waves of specific tones.

Thin-film bulk acoustic resonator

A thin-film bulk acoustic resonator (FBAR or TFBAR) is a device consisting of a piezoelectric material manufactured by thin film methods between two conductive – typically metallic – electrodes and acoustically isolated from the surrounding medium. The operation is based on the piezoelectricity of the piezolayer between the electrodes. FBAR devices using piezoelectric films with thicknesses ranging from several micrometres down to tenths of micrometres resonate in the frequency range of 100 MHz to 20 GHz.

Ceramic resonator

A ceramic resonator is an electronic component consisting of a piece of a piezoelectric ceramic material with two or more metal electrodes attached. When connected in an electronic oscillator circuit, resonant mechanical vibrations in the device generate an oscillating signal of a specific frequency. Like the similar quartz crystal, they are used in oscillators for purposes such as generating the clock signal used to control timing in computers and other digital logic devices, or generating the carrier signal in analog radio transmitters and receivers.

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Publications associées (2)

Solid-gap resonators based on PVDF-TrFE

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