Piezoelectric Nano-Balance for RNA Detection

Mass sensors, such as contour mode resonators are promising approach for biosensing in liquid environment. Their miniaturization offers many advantages, including small sample volume, rapid analysis, low power consumption, and integration of multiple devices. This study reports on the microfabrication and characterization of AlN contour mode resonator for biosensing. The resonators are coated with gold layer for further biofunctionalization and are assembled with a tailored microfluidic for delivering liquid in close proximity of the sensing layer. The quality factor of the resonators measured in DI water and PBS is around 70, while in air is up to 847. Based on this study, future improvements are proposed for the fabrication of better-performing devices.