0-level Vacuum Packaging RT Process for MEMS Resonators

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Flash memories based on nanoparticles (NPs) offer an attractive alternative for performance enhancement and size downscaling of non-volatile memory cells. In these devices, Coulomb blockade and quantized charging effects can be exploited at room temperature for a limited number of addressed NPs [1]. A successful exploitation of these nanoscale effects requires not only knowledge of the NPs properties (size, nature, structure and location) but also a sound understanding of the charge trapping phenomena that

The invention relates to a process for increasing the melt viscosities of polyester resins. This process comprises a step of heating the polyester resin in the temperature range comprised between the melting temperature of the polyester resin and the degradation temperature of the polyester resin with the addition of at least one modifier compound which has at least three glycidyl side chains. The improved polyester resins, having such improved properties, are used for the production of polyester foamed mat

We consider the rate-distortion problem for sensing the continuous space-time physical temperature in a circular ring on which a heat source is applied over space and time, and which is allowed to cool by radiation or convection. The heat source is modelled as a continuous space-time stochastic process which is bandlimited over space and time. The temperature field is the result of a certain continuous space-time convolution of the heat source with the Green's function corresponding to the heat equation, wh

This thesis analyzes the properties of heavily doped nanocrystalline titanium dioxide. Thin films were deposited by magnetron sputtering with either water vapor as reactive gas or a periodically interrupted oxygen supply. The samples were at the same time electrically conducting and transparent. They consisted of mixtures of rutile, anatase and amorphous phases. Titanium dioxide is chemically stable, hard, non-toxic, transparent, and inexpensive. Due to a high refractive index it is often found in optical a

The endeavour to develop nanodevices demands for patterning methods in the nanometer scale. The continuous improvement in lithography methods based on deep UV (DUV), X-ray, or electron beam exposure allow for further progress in integrated circuit hardware manufacturing for the coming years. To bring nanodevices to the market, however, there is a need for fast, low-cost replication nanopatterning methods. In addition, an increased flexibility of the nanopatterning methods is important for the engineering of

Zinc oxide (ZnO) is a material that belongs to the family of Transparent Conductives Oxides (TCO). Its non-toxicity and the abundant availability in the Earth's crust of its components make it an ideal candidate as electrical transparent contact for thin-film amorphous and/or microcrystalline silicon solar cells. The Low-Pressure Chemical Vapour Deposition (LP-CVD) method allows one to obtain rough ZnO layers, which can effectively scatter the light that passes through them. This high scattering capacity in

Pb(Zr-x, Ti1-x)O-3 (PZT) piezoelectric thin films are of major interest in MEMS technology for their ability to provide electro-mechanical coupling. In this work, the effective transverse piezoelectric coefficient e(31,f) of sol-gel processed films was investigated as a function of composition, film texture and film thickness. Dense, textured and crack-free PZT films have been obtained on silicon substrates up to a thickness of 4 mum. Crystallization anneals have been performed for every 0.25 mum. Nucleatio

Microcavity exciton polaritons, the fundamental optical excitations of semiconductor microcavities with quantum wells inside, have been proposed as promising candidates for observing stimulated scattering, condensation and other phenomena related to the bosonic nature of excitons. Having a light mass, quantum degeneracy of polaritons can be reached at low densities and high temperatures. But the radiative time of polaritons is very short (in the picosecond range) and usually prevents an efficient thermaliza

In the search for a good dimensionally stable anode-type electrode, p-silicon (1-3 mW cm) has been chosen as the substrate material due to its high anodic stability and its reasonable cost compared to titanium and tantalum. Several p-Si/IrO2 electrodes have been prepd. by thermal decompn. at different temp. The effect of prepn. temp. on the morphol. and electrochem. properties has been investigated by SEM anal., X-ray diffraction, and cyclic voltammetry in 1 M HClO4 showing that p-Si/IrO2 prepd. at 450 DegC

A wide range of applications in neurotechnological research rely on planar microelectrode arrays (MEA) but the disadvantage of these systems is the low density of electrodes caused by the problem of wiring a great number of electrodes. In turn this results in a low number of good cell to electrode contacts. To overcome this drawback, a great number of laterally isolated sub-um electrodes is placed on a photoconductor layer (amorphous silicon a-Si:H). By use of a laser beam, only those sub-um electrodes lyin

The effect of internal stresses on the cohesion and adhesion of a thin silicon oxide (SiOx) oxygen-barrier coating, evaporated on a poly(ethylene terephthalate) (PET) film substrate was studied. Internal stresses were generated during annealing in the temperature range for recrystallization of the PET,during calendering in a multilayer structure where two SiOx/PET films were laminated together with a polypropylene film, and during long-term thermal aging below the glass transition temperature of the polymer

Thermoforming of doubly-curved sandwich components will o er new design possibilities and cost-e ective manufacturing routes. However, the occurrence of folds and wrinkles in face sheets is directly linked to the fabric architecture and constitutes a process-limiting factor. Drapability tests have shown that knitted fabrics are less susceptible to wrinkling than woven preforms because their loop structure can more easily accommodate large deformations. In the experiments described here, a novel glass warp-k

0-level Vacuum Packaging RT Process for MEMS Resonators

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Charging dynamics of localized 2D layers of Si nanocrystals embedded into SiO2 by stencil masked ultra low energy ion implantation process

Increasing the melt viscosities of a polyester resin

Rate-Distortion Problem for Physics Based Distributed Sensing

Free carriers in nanocrystalline titanium dioxide thin films

High-throughput surface patterning with wafer-sized stencils fabricated by a DUV/MEMS process

L'oxyde de zinc par dépôt chimique en phase vapeur comme contact électrique transparent et diffuseur de lumière pour les cellules solaires

{100}-textured, piezoelectric Pb(Zr-x Ti1-x)O-3 thin films for MEMS: integration, deposition and properties

Polariton amplification in semiconductor microcavities

Dimensionally Stable Anode-Type Anode Based on Conductive p-Silicon Substrate

Electrical properties of light-addressed sub-µm electrodes fabricated by use of nanostencil-technology

Internal Stresses and Adhesion of Thin Silicon Oxide Coatings on Poly(ethylene terephthalate)

Warp-knit laminates for stampable sandwich preforms