Low-Cost Readout Electronics for Piezoresistive MEMS-Based Transducers

The designs fabrication and testing of low-cost readout electronics for piezoresistive MEMS-based transducers are presented in this paper. The proposed circuit architecture has a low input referred noise power spectral density of 60nV/root Hz a latency of 2.5 mu s and provides offset compensation with a resolution of 72 mu V for piezoresistive MEMS-based transducers such as microcantilevers and micromembranes. Measurement results performed with a microcantilever used for force measurements and a micromembrane used for pressure measurements show the excellent performance of the proposed readout electronics for a frequency range from 10Hz to 9.6kHz.