Publication
We demonstrate a novel technique of contour-mode suppression of an integrated MEMS-photonic chip up to the first HBAR mode at 17 MHz. The flattened actuation response is critical to the development of compact LiDAR engine or low-noise frequency-agile laser. (c) 2021TheAuthor(s)
Christian Gabriel Theiler, Olivier Claude Martin Février, Sophie Danielle Angelica Gorno, Garance Hélène Salomé Durr-Legoupil-Nicoud, Massimo Carpita, Kim Dimuth Von Allmen
Fabio Nobile, Jürg Alexander Schiffmann, Dimitri Maurice Goutaudier