Thermal Analysis of the advanced single-stage planar actuator

The Advanced Single-stage Planar Actuator (ASPA) is a nanometer-accurate magnetically levitated planar actuator with moving magnets. It is designed at the Eindhoven University of Technology in collaboration with an industrial partner active in the semiconductor industry. The first version of the ASPA is already industrialized. In order to significantly improve both accuracy and acceleration, the design procedure of a new ASPA is started. The goal of this project is to generate a thermal model of the ASPA and to study possible cooling concepts of the new version. The thermal model should be sufficiently detailed in order to account for various thermal phenomena presented in the motor, such as heat transfer between the stator and mover, cooling system and conduction heat transfer between various layers.