Self-Assembled Liquid-Gated Zinc Oxide Nanowire Transistors : Fabrication and Sensing Operation

This thesis aims at the site-specific realization of self-assembled field-effect transistors (FETs) based on semiconducting Zinc oxide NWs and their application towards chemical and bio-sensing in liquid medium. At first, a solution based growth method for hierarchical ZnO nanostructures was devised in order to achieve synthesis of high quality ZnO NWs. This solution based growth method was then deployed for the growth of NWs from preferred sites on a substrate. In order to make a transistor, microelectrode pairs prewritten on a Si/SiO2 chip (4mm◊4mm) using standard photolithography procedure served as growth sites and also formed source and drain terminals. The NWs bridging these "source" and "drain" electrodes formed the transistor channel. The procedure here yields ZnO NWs in up to 100 percent of the positions available for growth. The site-specific self-assembled fabrication of ZnO NW FETs was evaluated in terms of scalability and applications. The procedure was extended from 4mm◊4mm silicon chips to large area silicon wafers (80mm◊80mm) and flexible substrates of Kapton polyimide of the same size. On the large area substrates this procedure yields ZnO NWs in up to 80 percent of the positions available for growth, which can be bettered. Furthermore, the method was also employed to fabricate ZnO NW FETs in situ in a microfluidic channel. For this purpose the precursor solution was let to flow on to the microelectrode pairs with the help of microfluidic channels assembled on top of the substrate. The substrate was heated locally under the microelectrode pairs to stimulate the NW growth. Thus a solution-based self-assembled fabrication of NW FETs was achieved locally inside a microfluidic channel. Microfluidic channels were made of silicon nitride (Si3N4) on top of Si/SiO2 chips and facilitated the characterization of FETs in liquid medium. Alternatively, microfluidic channels made of polydimethylsiloxane (PDMS) were used for characterization of transistor devices in liquids. In order to deploy FETs in liquids, the back-gate is replaced by a reference electrode (Ag/AgCl) and the potential is applied through a liquid surrounding the transistor channel (ZnO NW). The liquid surrounding the ZnO NW creates an electrochemical double layer (EDL) on the NW surface which in turn gives rise to the gate capacitance. The resulting gating effect can be used to modulate the NW conductance depending on the voltage applied through the liquid. The ZnO NW transistors showed a current modulation of up to 6 orders of magnitude, high field-effect mobilities (around 1.85 cm2/Vs) and sub-threshold slopes as low as 105 mV/decade. This is the first demonstration of liquid-gated FETs using ZnO NWs. The liquid-gated FETs are used as a basic device for further sensing trials in liquids. For this purpose, the FETs were functionalized with receptor molecules. These so called ion-selective FETs (ISFETs) were demonstrated as functional pH sensors for liquids with pH values fro