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Photonic integrated circuits are becoming increasingly more complex, especially with the emergence of programmable photonic circuits. These require many tunable photonic elements, such as electro-optic phase shifters and tunable couplers. We will discuss our progress in compact, low-power silicon photonics actuators based on heaters, liquid crystal and MEMS that can be scaled up to large circuits. (c) 2021TheAuthor(s)
Tobias Kippenberg, Rui Ning Wang, Anat Siddharth, Terence Albert Emile Blésin, Wil Kao
Jamie Paik, Yousef Jalali, Iris Capdevila Tristan
Demetri Psaltis, Christophe Moser, Niyazi Ulas Dinç, Ilker Oguz, Mustafa Yildirim, Carlo Gigli, Jih-Liang Hsieh, Yi Zhou Ju