Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering

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We present the use of an array of rectangular microelectrodes to discriminate between different resistivities in a thin, layered sample. Each electrode was 8 rum long and 200 nm thick. The electrode widths ranged from 20 to 500/mum. The electrodes were designed such that all pairs of consecutive electrodes had the same relative geometry, and therefore identical cell constants. A hydrogel-based tissue phantom, made by photopolymerization of 2-hydroxyethyl methacrylate (HEMA), was developed. By changing the h

The present work investigates the possibility of selective electrochemical metal deposition on ion implanted p-Si. The idea is that defects introduced into the substrate by ion implantation make it more susceptible to electrochemical reactions compared to intact Si; this increased sensitivity is to be used for selective reactions at the defect sites. It is believed that the increased reactivity is due to a lowering of the Schottky barrier breakdown potential, Ubd, of the semiconductor-electrolyte interface

Electrochem. and phys. properties of polycryst. B-doped diamond electrodes with a metallic conduction grown by MPCVD and HFCVD were studied with the goal to use them as cathodes, for the electrochem. redn. of nitrate in neutral solns. All electrodes contain a mean B concn. [B] >3 * 1020/cm3 and show a significant redn. of nitrate. However, the higher efficiency is obtained for the electrode having the highest [B] (1.5 * 1021/cm3) and the lowest concn. of parasitic phases. The anal. of the Raman spectrum pro

MOLED solves the dynamics of electrons and holes in multilayer organic light emitting diodes (OLED). The carriers are injected on the positive and negative electrodes of the device by tunneling through a potential barrier. Thermal excitation processes across the barrier are also included. In the interior of the device the electron-hole recombination occurs when the two carriers are close enough, according to a model inspired from the one of Langevin. A fraction of these recombined pairs gives photons. The c

Unexpectedly high-longitudinal piezoelectric coefficients have recently been reported in c-axis oriented Pb(Zr,Ti)O-3 thin films with morphotropic phase boundary composition [Fu , Appl. Phys. Lett. 80, 3572 (2002)]. Our analysis and experimental results show that, in comparison with other methods commonly used to investigate piezoelectric response of thin films, the charge integration technique used by Fu may lead to an order of magnitude higher apparent piezoelectric coefficients if the substrate on which

The aim of this work was to develop a microchamber system for performing electrophysiological measurements on epithelial surface on culture membranes in the mm2 range. This miniaturised system permits the use of small quantities of epithelial cells, which in relatively short time grow into a tight layer that can be used in electrophysiological (ion transport) experiments. Availability of cells is an issue, for example when the cells originate from human biopsies or from (expensive!) transgenic mice. Apart f

We use a pulsed laser deposition (PLD) setup to grow ultra-thin films of high temperature superconductors (HTSC) and transfer them in-situ into a photoemission chamber. Photoemission measurements on such films allow us to study noncleavable materials, but can also give insights into aspects never measured before, like the influence of strain on the low energy electronic structure. Systematic studies of many different materials grown as films showed that Bi2Sr2CaCu2O8+x, Bi2Sr2Cu1O6+x, Bi2Sr2Ca2Cu3O10+x, and

The oxidn. of benzoic acid has been performed on boron doped diamond electrodes supported on silicon substrate. The voltammetric behavior has shown that during the oxidn. of benzoic acid at 2.7V (RHE), a polymeric film is formed on the electrode surface that is oxidized at higher potential values. Bulk electrolysis of benzoic acid in HClO4, under galvanostatic conditions results in an instantaneous current efficiency(ICE) near 100% at low current densities and high benzoic acid concns. Electrolysis at high

A consortium was created to investigate electroceramic materials that show ionic or mixed ionic-electronic conduction (MIEC), for application as oxygen separation membranes and in solid oxide fuel cells (SOFC, electrolytes and cathodes). The focus is on dense structures as supported thin layers (5-20 µm) for reduced temperature operation (600-750°C). Under these conditions grain boundary effects are important. Zirconia, ceria and gallate are considered for SOFC electrolytes. The nature and the amount of the

There is a need for chemically resistant coatings that protect the exposed surface of microfluidics components. Pinhole free films with low stress and a good uniformity on flat and inclined surfaces are required. In this study, amorphous silicon carbide (SiC) thin films have been deposited by RF magnetron sputtering on hat surfaces and into micromachined cavities of Si (100). The variation of RF power, deposition pressure and substrate bias voltage have been studied. Depending on the deposition conditions,

Intermetallic thin films of stoichiometric NiAl and Ni3Al have been deposited onto n-type silicon (100) and nickel (110) substrates using r.f.-magnetron co-sputtering. The morphology and crystal structure of the thin films have been studied by transmission electron microscopy from planar-view and cross-sectional samples. Chemical order has been assessed using nano-diffraction techniques. Superlattice reflections confirm a fully ordered structure in both intermetallics. These NiAl and Ni3Al thin films are na

The anodic oxidn. of H2SO4 to H2S2O8 was investigated on B-doped synthetic diamond electrodes obtained by hot filament chem. vapor deposition. High current efficiency for H2S2O8 formation can be achieved in concd. H2SO4 (7.5 mol dm-3) and using high current densities (200 mA cm-2). The main side reaction is oxygen evolution. [on SciFinder (R)]

Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering

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Resistivity probing of multi-layered tissue phantoms using microelectrodes

Electrochemical investigation of ion implanted p-Si

Boron doped diamond electrodes for nitrate elimination in concentrated wastewater

MOLED: simulation of multilayer organic light emitting diodes

Piezoelectric response of thin films determined by charge integration technique: Substrate bending effects

Biosystem for the culture and electrical characterisation of epithelial cell tissues

Electronic properties of high temperature superconducting thin films grown by pulsed laser deposition

Electrochemical oxidation of benzoic acid on boron doped diamond electrodes

Ceramic Oxygen Separation Membranes and Mixed Conductors

Sputtered silicon carbide thin films as protective coating for MEMS applications

Microstructure and growth modes of stoichiometric NiAl and Ni3Al thin films deposited by r.f.-magnetron sputtering

Preparation of peroxodisulfuric acid using boron-doped diamond thin film electrodes