Publication

Release area confinement in Contour Mode Resonators

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III-Nitride Semiconductor Photonic Nanocavities on Silicon

Optical nanocavities enhance light-matter interaction due to their high quality factors (Q) and small modal volumes (V). The control of light-matter interaction lies at the heart of potential applications for integrated optical circuits, including optical ...

EPFL2018

Conformal Deposition of Conductive Single-Crystalline Cobalt Silicide Layer on Si Wafer via a Molecular Approach

Giovanni De Micheli, Pierre-Emmanuel Julien Marc Gaillardon, Tsung-Han Lin, David Baudouin, Olha Sereda

The realization of metal-semiconductor contacts plays a significant role in ultrascaled integrated circuits. Here, we establish a low-temperature molecular approach for the conformal deposition of a 20-nm Co-rich layer on Si (100) wafers by reaction in sol ...

2018