AlN-based anodes for far-UVC field emission device at 225 nm

We report on progress in the realization of Field Emission Devices (FED) with AlN-based anodes emitting in the spectral window of 200-230nm for persistent disinfection of air and surfaces in the presence of humans. Modeling, experimental studies, and trade-offs between sputter deposition and MOVPE grown AlN anode films and GaN/AlN multiple quantum wells (MQW) indicate the feasibility of 1’’-size FED emitting at 225 nm wavelength with 1 mW power, capable to quickly deactivate the SARS-CoV-2 virus.